Optical sensing technique for Youngs modulus measurements in piezoelectric materials
In the design of microsensors using microelectromechanical system (MEMS) technology, it is necessary to know the elastic properties ofthe materials employed in their fabrication. Reliable mechanical properties of the materials are critical to the safety and correct functioningof these microdevices....
| Autores: | , , , , |
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| Tipo de recurso: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2008 |
| País: | México |
| Institución: | Universidad Nacional Autónoma de México |
| Repositorio: | Redalyc-UNAM |
| OAI Identifier: | oai:redalyc.org:57054312 |
| Acceso en línea: | https://www.redalyc.org/articulo.oa?id=57054312 |
| Access Level: | acceso abierto |
| Palabra clave: | Física, Astronomía y Matemáticas Youngs Modulus piezoelectric cantilever |
| Sumario: | In the design of microsensors using microelectromechanical system (MEMS) technology, it is necessary to know the elastic properties ofthe materials employed in their fabrication. Reliable mechanical properties of the materials are critical to the safety and correct functioningof these microdevices. Mechanical testing of microstructures that are only a few microns thick requires novel techniques and specializedprocedures for preparation and handling. In this paper a simplified optic sensing is used to measure the Youngs modulus in piezoelectriccantilever. This optical technique was chosen because it is the most appropriate when working with small devices, besides being easilyimplemented and low cost |
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