Effect of the plasma composition on the structural and electronic properties of as-grown SiOx/Si heterolayers depositedby reactive sputtering

Mota, Esteban; Melendez, Miguel; Zapata, Martin; Perez, Armando; Santana, Miguel; Del angel, Pedro

Effect of the plasma composition on the structural and electronic properties of as-grown SiOx/Si heterolayers depositedby reactive sputtering

CONACYT, IPN

Detalles Bibliográficos
Autores:	Mota, Esteban, Melendez, Miguel, Zapata, Martin, Perez, Armando, Santana, Miguel, Del angel, Pedro
Tipo de recurso:	artículo
Estado:	Versión publicada
Fecha de publicación:	2009
País:	México
Institución:	Instituto Politécnico Nacional
Repositorio:	Repositorio Digital del IPN
OAI Identifier:	oai:www.repositoriodigital.ipn.mx:123456789/10661
Acceso en línea:	http://hdl.handle.net/123456789/143 http://www.repositoriodigital.ipn.mx/handle/123456789/10661
Access Level:	acceso abierto
Palabra clave:	SiOx Si

Descripción
Sumario:	CONACYT, IPN

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Effect of the plasma composition on the structural and electronic properties of as-grown SiOx/Si heterolayers depositedby reactive sputtering

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