Vibration modeling and testing of bilayer beams for determination of film elastic modulus
Analysis of the main parameters affecting the fundamental vibrating frequency of film/substrate bilayer beams of rectangular cross-section is discussed based on modeling and testing. Initially, the limits of validity of two analytical models to obtain the fundamental frequency of perfectly-bonded bi...
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| Tipo de recurso: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2012 |
| País: | México |
| Institución: | Centro de Investigación Científica de Yucatán |
| Repositorio: | Repositorio Institucional CICY |
| OAI Identifier: | oai:cicy.repositorioinstitucional.mx:1003/180 |
| Acceso en línea: | http://cicy.repositorioinstitucional.mx/jspui/handle/1003/180 |
| Access Level: | acceso abierto |
| Palabra clave: | info:eu-repo/classification/cti/7 |
| Sumario: | Analysis of the main parameters affecting the fundamental vibrating frequency of film/substrate bilayer beams of rectangular cross-section is discussed based on modeling and testing. Initially, the limits of validity of two analytical models to obtain the fundamental frequency of perfectly-bonded bilayer beams in cantilever configuration are determined by comparing the predicted frequencies to a finite element model developed herein. Using a selected analytical formulation, a modeling-assisted methodology is employed to investigate the parameters that are most influential on the determination of the elastic modulus of the film using a vibratory technique. Modeling suggests the use of thin compliant substrates for extracting the modulus of stiff (metallic) films. If the substrate is stiffer than the film, a thicker film is required to yield measurable shifts in the resonant frequency. The elastic modulus of a millimeter-thick thermosetting polymer extracted by this method agrees with the results obtained from conventional tensile testing of the polymer. Measurements carried out on a gold (100 nm)/polysulfone (130μm) system yield an average elastic modulus of the gold film similar to the values reported in the literature. |
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