XPS, AES and EELS study of the bonding character in CNx films

We discuss the possibility of using photoemitted electrons corresponding to carbon 1s, in order to resolve the chemicalstate and the hybridization character of carbon in amorphous carbon nitride films (a-CNx). A series of carbon nitridefilms were prepared at room temperature by ablating a graphite t...

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Detalles Bibliográficos
Autores: R. Machorro, L. Cota Araiza, E. C. Sámano, M. H. Farías, G. Soto, F. F. Castillón
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2002
País:México
Institución:Universidad Nacional Autónoma de México
Repositorio:Redalyc-UNAM
OAI Identifier:oai:redalyc.org:94201509
Acceso en línea:https://www.redalyc.org/articulo.oa?id=94201509
Access Level:acceso abierto
Palabra clave:Física, Astronomía y Matemáticas
XPS
AES
EELS
Polymer
Chemical state
Descripción
Sumario:We discuss the possibility of using photoemitted electrons corresponding to carbon 1s, in order to resolve the chemicalstate and the hybridization character of carbon in amorphous carbon nitride films (a-CNx). A series of carbon nitridefilms were prepared at room temperature by ablating a graphite target in a background of molecular nitrogen in thepressure range from high vacuum to 500 mTorr. The films were analyzed by means of XPS, EELS and AES. XPS resultsshow the existence of two predominant binding states for both, nitrogen and carbon. The effect of heat treatment is todecrease the nitrogen content in the films, and the sharpening of the binding configuration of carbon. EELS resultsindicate that the films have predominantly sp2-hybridized carbon, before and after heat treatment, and no evidence ofcarbon in the sp3 configuration was found. Thereupon, we conclude that it is not feasible to determine the hybridizationstate for carbon from XPS measurements alone, and that the nitrogen and carbon are co-existent in a polymer-like film