Effect of the incorporation of titanium on the optical properties of zno thin films: from doping to mixed oxide formation

ZnO films with Ti atoms incorporated (TZO) in a wide range (0–18 at.%) have been grown by reactive co-sputtering on silicon and glass substrates. The influence of the titanium incorporation in the ZnO matrix on the structural and optical characteristics of the samples has been determined by Rutherfo...

Descripción completa

Detalles Bibliográficos
Autores: Yuste Yuste, Miriam, Escobar Galindo, Ramón, Benito Gómez, Noelia, Palacio Orcajo, Carlos, Martínez, Oscar, Albella Martín, José María, Sánchez Garrido, Olga
Tipo de recurso: artículo
Fecha de publicación:2019
País:España
Institución:IAPH
Repositorio:Biblos-e Archivo. Repositorio Institucional de la UAM
Idioma:inglés
OAI Identifier:oai:repositorio.uam.es:10486/714131
Acceso en línea:http://hdl.handle.net/10486/714131
https://dx.doi.org/10.3390/coatings9030180
Access Level:acceso abierto
Palabra clave:Ti doped ZnO
thin film
co-sputtering
UV-visible
Física
id ES_fc22eb58d467772bc70935d38c596a9d
oai_identifier_str oai:repositorio.uam.es:10486/714131
network_acronym_str ES
network_name_str España
repository_id_str
spelling Effect of the incorporation of titanium on the optical properties of zno thin films: from doping to mixed oxide formationYuste Yuste, MiriamEscobar Galindo, RamónBenito Gómez, NoeliaPalacio Orcajo, CarlosMartínez, OscarAlbella Martín, José MaríaSánchez Garrido, OlgaTi doped ZnOthin filmco-sputteringUV-visibleFísicaZnO films with Ti atoms incorporated (TZO) in a wide range (0–18 at.%) have been grown by reactive co-sputtering on silicon and glass substrates. The influence of the titanium incorporation in the ZnO matrix on the structural and optical characteristics of the samples has been determined by Rutherford backscattering spectroscopy (RBS), X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD). The results indicate that the samples with low Ti content (<4 at.%) exhibit a wurtzite-like structure, with the Ti4+ ions substitutionally incorporated into the ZnO structure, forming Ti-doped ZnO films. In particular, a very low concentration of Ti (<0.9 at.%) leads to a significant increase of the crystallinity of the TZO samples. Higher Ti contents give rise to a progressive amorphization of the wurtzite-like structure, so samples with high Ti content (≥18 at.%) display an amorphous structure, indicating in the XPS analysis, a predominance of Ti–O–Zn mixed oxides. The energy gap obtained from absorption spectrophotometry increases from 3.2 eV for pure ZnO films to 3.6 eV for those with the highest Ti content. Ti incorporation in the ZnO samples <0.9 at.% raises both the blue (380 nm) and green (approx. 550 nm) bands of the photoluminescence (PL) emission, thereby indicating a significant improvement of the PL efficiency of the samplesWe acknowledge financial support from the Comunidad Autónoma de Madrid under project DIMMAT ref: CAM S2013/MIT-2775 and from the Spanish government under the project MAT2015-68892-RMDPI AGDepartamento de Física de MaterialesFacultad de Ciencias20192019-03-08research articlehttp://purl.org/coar/resource_type/c_2df8fbb1VoRhttp://purl.org/coar/version/c_970fb48d4fbd8a85info:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/10486/714131https://dx.doi.org/10.3390/coatings9030180reponame:Biblos-e Archivo. Repositorio Institucional de la UAMinstname:IAPHInglésengopen accesshttp://purl.org/coar/access_right/c_abf2Attribution 4.0 Internationalhttp://creativecommons.org/licenses/by/4.0/info:eu-repo/semantics/openAccessoai:repositorio.uam.es:10486/7141312026-06-23T12:46:27Z
dc.title.none.fl_str_mv Effect of the incorporation of titanium on the optical properties of zno thin films: from doping to mixed oxide formation
title Effect of the incorporation of titanium on the optical properties of zno thin films: from doping to mixed oxide formation
spellingShingle Effect of the incorporation of titanium on the optical properties of zno thin films: from doping to mixed oxide formation
Yuste Yuste, Miriam
Ti doped ZnO
thin film
co-sputtering
UV-visible
Física
title_short Effect of the incorporation of titanium on the optical properties of zno thin films: from doping to mixed oxide formation
title_full Effect of the incorporation of titanium on the optical properties of zno thin films: from doping to mixed oxide formation
title_fullStr Effect of the incorporation of titanium on the optical properties of zno thin films: from doping to mixed oxide formation
title_full_unstemmed Effect of the incorporation of titanium on the optical properties of zno thin films: from doping to mixed oxide formation
title_sort Effect of the incorporation of titanium on the optical properties of zno thin films: from doping to mixed oxide formation
dc.creator.none.fl_str_mv Yuste Yuste, Miriam
Escobar Galindo, Ramón
Benito Gómez, Noelia
Palacio Orcajo, Carlos
Martínez, Oscar
Albella Martín, José María
Sánchez Garrido, Olga
author Yuste Yuste, Miriam
author_facet Yuste Yuste, Miriam
Escobar Galindo, Ramón
Benito Gómez, Noelia
Palacio Orcajo, Carlos
Martínez, Oscar
Albella Martín, José María
Sánchez Garrido, Olga
author_role author
author2 Escobar Galindo, Ramón
Benito Gómez, Noelia
Palacio Orcajo, Carlos
Martínez, Oscar
Albella Martín, José María
Sánchez Garrido, Olga
author2_role author
author
author
author
author
author
dc.contributor.none.fl_str_mv Departamento de Física de Materiales
Facultad de Ciencias
dc.subject.none.fl_str_mv Ti doped ZnO
thin film
co-sputtering
UV-visible
Física
topic Ti doped ZnO
thin film
co-sputtering
UV-visible
Física
description ZnO films with Ti atoms incorporated (TZO) in a wide range (0–18 at.%) have been grown by reactive co-sputtering on silicon and glass substrates. The influence of the titanium incorporation in the ZnO matrix on the structural and optical characteristics of the samples has been determined by Rutherford backscattering spectroscopy (RBS), X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD). The results indicate that the samples with low Ti content (<4 at.%) exhibit a wurtzite-like structure, with the Ti4+ ions substitutionally incorporated into the ZnO structure, forming Ti-doped ZnO films. In particular, a very low concentration of Ti (<0.9 at.%) leads to a significant increase of the crystallinity of the TZO samples. Higher Ti contents give rise to a progressive amorphization of the wurtzite-like structure, so samples with high Ti content (≥18 at.%) display an amorphous structure, indicating in the XPS analysis, a predominance of Ti–O–Zn mixed oxides. The energy gap obtained from absorption spectrophotometry increases from 3.2 eV for pure ZnO films to 3.6 eV for those with the highest Ti content. Ti incorporation in the ZnO samples <0.9 at.% raises both the blue (380 nm) and green (approx. 550 nm) bands of the photoluminescence (PL) emission, thereby indicating a significant improvement of the PL efficiency of the samples
publishDate 2019
dc.date.none.fl_str_mv 2019
2019-03-08
dc.type.none.fl_str_mv research article
http://purl.org/coar/resource_type/c_2df8fbb1
VoR
http://purl.org/coar/version/c_970fb48d4fbd8a85
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv http://hdl.handle.net/10486/714131
https://dx.doi.org/10.3390/coatings9030180
url http://hdl.handle.net/10486/714131
https://dx.doi.org/10.3390/coatings9030180
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
Attribution 4.0 International
http://creativecommons.org/licenses/by/4.0/
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
Attribution 4.0 International
http://creativecommons.org/licenses/by/4.0/
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv MDPI AG
publisher.none.fl_str_mv MDPI AG
dc.source.none.fl_str_mv reponame:Biblos-e Archivo. Repositorio Institucional de la UAM
instname:IAPH
instname_str IAPH
reponame_str Biblos-e Archivo. Repositorio Institucional de la UAM
collection Biblos-e Archivo. Repositorio Institucional de la UAM
repository.name.fl_str_mv
repository.mail.fl_str_mv
_version_ 1869425394391711744
score 15,812429

Similares en LA Referencia