Permittivity and loss characteristics of SU8-quartz composite photoresist at THz frequencies
An SU8-quartz composite photoresist has been fabricated and characterized from 1.2 to 1.4 THz; the material contains quartz particles from 0 to 50 wt%. The composite can reduce the inherent losses of SU8 photoresist at terahertz frequencies. Calculated and measured data is presented and compared wit...
| Autores: | , , , , , |
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| Tipo de recurso: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2016 |
| País: | España |
| Institución: | Centre Tecnològic de Telecomunicacions de Catalunya (CTTC) |
| Repositorio: | r-CTTC. Repositorio Institucional Producción Científica del Centre Tecnològic de Telecomunicacions de Catalunya (CTTC) |
| OAI Identifier: | oai:cttc.fundanetsuite.com:p1821 |
| Acceso en línea: | https://cttc.fundanetsuite.com/Publicaciones/ProdCientif/PublicacionFrw.aspx?id=1821 https://www.scopus.com/inward/record.uri?eid=2-s2.0-84979657294&doi=10.1002%2fmop.30041&partnerID=40&md5=45b1dbec004288b24f929462ed8d51d2 |
| Access Level: | acceso abierto |
| Palabra clave: | Permittivity Photoresists Electrical parameter Electronic materials Permittivity and loss Quartz particles SU-8 photoresist Tera Hertz Terahertz frequencies THz frequencies Quartz |
| Sumario: | An SU8-quartz composite photoresist has been fabricated and characterized from 1.2 to 1.4 THz; the material contains quartz particles from 0 to 50 wt%. The composite can reduce the inherent losses of SU8 photoresist at terahertz frequencies. Calculated and measured data is presented and compared with SU8 without quartz inclusions. The results show a reduction in losses and an increase in permittivity in the composite material as the density of quartz particles increases. This initial experiment proves the possibility of modifying the electrical parameters of SU8; increasing the quartz density of the composite will modify these parameters further at THz frequencies. © 2016 Wiley Periodicals, Inc. Microwave Opt Technol Lett 58:2329–2330, 2016. © 2016 Wiley Periodicals, Inc. |
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