Supporting Information: Combined swelling and metal infiltration: Advancing block copolymer pattern control for nanopatterning applications

ImageJ measurement of feature sizes from XTEM and SEM images; comprehensive error analysis and statistical evaluations of the experimental data are provided; additional information on results obtained using XPS, GISAXS, and ellipsometry; discussion on VPP control variables and potential applications...

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Detalles Bibliográficos
Autores: Mullen, Eleanor, Alvarez-Fernandez, Alberto, Prochukhan, Nadezda, Davó-Quiñonero, Arantxa, Bekarevich, Raman, Gity, Farzan, Sheehan, Brendan, Baez Vasquez, Jhonattan Frank, Gatensby, Riley, Bentaleb, Ahmed, Ward, Alan, Hurley, Paul K., Morris, Michael A.
Tipo de recurso: conjunto de datos
Fecha de publicación:2025
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/388671
Acceso en línea:http://hdl.handle.net/10261/388671
Access Level:acceso abierto
Descripción
Sumario:ImageJ measurement of feature sizes from XTEM and SEM images; comprehensive error analysis and statistical evaluations of the experimental data are provided; additional information on results obtained using XPS, GISAXS, and ellipsometry; discussion on VPP control variables and potential applications of VPP.