Hernández Muñoz, M. J., Garrido Salas, J., Martínez, J., & Piqueras, J. (1994). Kinetics and compositional dependence on the microwave power and DiH4/N flow ratio of silicon nitride deposited by electron cyclotron resonance plasmas.
Citación estilo ChicagoHernández Muñoz, María Jesús, Javier Garrido Salas, J. Martínez, y Juan Piqueras. Kinetics and Compositional Dependence On the Microwave Power and DiH4/N Flow Ratio of Silicon Nitride Deposited By Electron Cyclotron Resonance Plasmas. 1994.
Cita MLAHernández Muñoz, María Jesús, Javier Garrido Salas, J. Martínez, y Juan Piqueras. Kinetics and Compositional Dependence On the Microwave Power and DiH4/N Flow Ratio of Silicon Nitride Deposited By Electron Cyclotron Resonance Plasmas. 1994.
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