Integración de ITO con silicio para desarrollar funcionalidades electro-ópticas
[EN] In a first attempt to use ITO as a heater for thermo-optic switching, a sample was fabricated with an ITO layer on top of a silicon waveguide with an oxide layer in between. Upon heating the ITO, it was noted that the optical response of an MZI shifted in the direction opposite to what would be...
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| Tipo de recurso: | tesis de maestría |
| Fecha de publicación: | 2016 |
| País: | España |
| Institución: | Universitat Politècnica de València (UPV) |
| Repositorio: | RiuNet. Repositorio Institucional de la Universitat Politécnica de Valéncia |
| Idioma: | español |
| OAI Identifier: | oai:riunet.upv.es:10251/92561 |
| Acceso en línea: | https://riunet.upv.es/handle/10251/92561 |
| Access Level: | acceso abierto |
| Palabra clave: | Fabrication and characterization. fotónica de silicio ITO circuitos integrados fotónicos Optoelectrónica TEORIA DE LA SEÑAL Y COMUNICACIONES Máster Universitario en Tecnologías, Sistemas y Redes de Comunicaciones-Màster Universitari en Tecnologies, Sistemes i Xarxes de Comunicacions |
| Sumario: | [EN] In a first attempt to use ITO as a heater for thermo-optic switching, a sample was fabricated with an ITO layer on top of a silicon waveguide with an oxide layer in between. Upon heating the ITO, it was noted that the optical response of an MZI shifted in the direction opposite to what would be expected from the thermo-optic effect in silicon. This counterintuitive result is the incentive of this Master thesis topic. In the first part, the Drude model is used to predict the optical behaviour of the ITO. This model is then used to simulate simple waveguide structures for absorptive and refractive modulation, under the assumption of tunability of the bulk carrier density. Afterwards, the fabrication procedure is documented in suficient detail to understand some of the mechanisms influencing the final structure's characteristics. The influence of oxygen during heat treatments on ITO's resistivity is discussed. Next, some ways to achieve bulk carrier density tuning for efficient modulation are proposed. These last two parts are almost entirely based on literature study. Next, optical switching is discussed and the measurement results are shown and discussed. In the time that was available, no clear causes were identified that explain the obtained results. After heating the structure for several hours, the response of the structure was found to be one order of magnitude smaller than before. The structure appears to have converged towards a more stable configuration. This text is an attempt to give a broad introduction to the topic, pointing out different parts that could be investigated separately in the future, dividing the problem in pieces. |
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