Automatització d'un forn de difusió i caracterització d'emissors de bor

[ENGLISH] In this project has presented the work of doing the diffusion furnace automation and of doing the fabrication and characterization of boron emitters. A programming from scratch has been designed in order to be able to automate the furnace. Two modes have been implemented, as their users re...

Descripción completa

Detalles Bibliográficos
Autor: Masmitjà Rusiñol, Gerard|||0000-0001-9541-7586
Tipo de recurso: tesis de maestría
Fecha de publicación:2013
País:España
Institución:Universitat Politècnica de Catalunya (UPC)
Repositorio:UPCommons. Portal del coneixement obert de la UPC
Idioma:catalán
OAI Identifier:oai:upcommons.upc.edu:2099.1/19051
Acceso en línea:https://hdl.handle.net/2099.1/19051
Access Level:acceso abierto
Palabra clave:Solar cells
Electric furnaces -- Automation
Cèl·lules solars
Forns elèctrics --Automatització
Semiconductors
Àrees temàtiques de la UPC::Enginyeria electrònica
Descripción
Sumario:[ENGLISH] In this project has presented the work of doing the diffusion furnace automation and of doing the fabrication and characterization of boron emitters. A programming from scratch has been designed in order to be able to automate the furnace. Two modes have been implemented, as their users required: the manual mode and the recipe mode. Therefore, as a first step, a study of the different parts of furnace, of the hardware and of the software, has been made. According to the results of this study, the furnace has been automated so that it controls the process temperature and the different gases involved. The interaction user-machine is made using a touch panel built in the PLC. For the purpose of facilitating its use, a simple computing environment has been created. For the boron emitters characterization, it has been made a study of the consequences that have influence on its properties such as the lifetime and the inverse dark current density. However several emitters with different processes have been made in order to attempt to optimize these properties. Moreover, several test machines have been used to find the lifetime and the sheet resistance, among others. Finally, a spreadsheet has been made for the purpose of doing fittings in the lifetime curve, using the associated functions, and consequently, finding the representative parameters. Therefore, this work deals with the different ambits of the electronic engineering such as: data acquisition, control elements, PLC programming, semiconductors processes (chemical and thermal) and the use of specific test machines, among others.