Fundamental role of arsenic flux in nanohole formation by Ga droplet etching on GaAs(001)

This is an Open Access article distributed under the terms of the Creative Commons Attribution License.

Detalles Bibliográficos
Autores: Fuster, David, González Díez, Yolanda, González Sotos, Luisa
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2014
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/99201
Acceso en línea:http://hdl.handle.net/10261/99201
Access Level:acceso abierto
Palabra clave:Droplet epitaxy
Quantum dots
Nanopatterning
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spelling Fundamental role of arsenic flux in nanohole formation by Ga droplet etching on GaAs(001)Fuster, DavidGonzález Díez, YolandaGonzález Sotos, LuisaDroplet epitaxyQuantum dotsNanopatterningThis is an Open Access article distributed under the terms of the Creative Commons Attribution License.Nanoholes with a depth in the range of tens of nanometers can be formed on GaAs(001) surfaces at a temperature of 500°C by local etching after Ga droplet formation. In this work, we demonstrate that the local etching or nanodrilling process starts when the Ga droplets are exposed to arsenic. The essential role of arsenic in nanohole formation is demonstrated sequentially, from the initial Ga droplets to the final stage consisting of nanoholes surrounded by ringlike structures at the surface and Ga droplets consumed. The kinetics of local etching depends on the arsenic flux intensity, while the ringlike structures are basically the same as those formed underneath the droplets in the absence of arsenic. These structures show motifs with well-defined crystalline facets that correspond to those expected from surface energy minimization. These experimental results are qualitatively analyzed for a better understanding of the nanohole formation underlying processes.We want to acknowledge the financial support from the Spanish MINECO through grants TEC2011-29120-C05-01/04, ENE2012-37804-C02-02, and AIC-B-2011-0806.We acknowledge the support of the publication fee by the CSIC Open Access Publication Support Initiative through its Unit of Information Resources for Research (URICI).Peer reviewedSpringer NatureMinisterio de Economía y Competitividad (España)CSIC - Unidad de Recursos de Información Científica para la Investigación (URICI)Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]201420142014info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501Publisher's versioninfo:eu-repo/semantics/publishedVersionhttp://hdl.handle.net/10261/99201reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Ingléshttp://dx.doi.org/10.1186/1556-276X-9-309Síinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/992012026-05-22T06:33:51Z
dc.title.none.fl_str_mv Fundamental role of arsenic flux in nanohole formation by Ga droplet etching on GaAs(001)
title Fundamental role of arsenic flux in nanohole formation by Ga droplet etching on GaAs(001)
spellingShingle Fundamental role of arsenic flux in nanohole formation by Ga droplet etching on GaAs(001)
Fuster, David
Droplet epitaxy
Quantum dots
Nanopatterning
title_short Fundamental role of arsenic flux in nanohole formation by Ga droplet etching on GaAs(001)
title_full Fundamental role of arsenic flux in nanohole formation by Ga droplet etching on GaAs(001)
title_fullStr Fundamental role of arsenic flux in nanohole formation by Ga droplet etching on GaAs(001)
title_full_unstemmed Fundamental role of arsenic flux in nanohole formation by Ga droplet etching on GaAs(001)
title_sort Fundamental role of arsenic flux in nanohole formation by Ga droplet etching on GaAs(001)
dc.creator.none.fl_str_mv Fuster, David
González Díez, Yolanda
González Sotos, Luisa
author Fuster, David
author_facet Fuster, David
González Díez, Yolanda
González Sotos, Luisa
author_role author
author2 González Díez, Yolanda
González Sotos, Luisa
author2_role author
author
dc.contributor.none.fl_str_mv Ministerio de Economía y Competitividad (España)
CSIC - Unidad de Recursos de Información Científica para la Investigación (URICI)
Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]
dc.subject.none.fl_str_mv Droplet epitaxy
Quantum dots
Nanopatterning
topic Droplet epitaxy
Quantum dots
Nanopatterning
description This is an Open Access article distributed under the terms of the Creative Commons Attribution License.
publishDate 2014
dc.date.none.fl_str_mv 2014
2014
2014
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
Publisher's version
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/99201
url http://hdl.handle.net/10261/99201
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv http://dx.doi.org/10.1186/1556-276X-9-309
Sí
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv Springer Nature
publisher.none.fl_str_mv Springer Nature
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
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score 15,81155

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