Ultraviolet pulsed laser crystallization of Ba0.8Sr0.2TiO3 films on LaNiO3-coated silicon substrates

In this work, BaSrTiO (BST) films on LaNiO-buffered SiO/Si (LNO/SiO/Si) substrates were crystallized by pulsed laser irradiation. Solution-derived amorphous barium-strontium-titanate precursor layers were crystallized with a KrF excimer laser in oxygen ambient at fluences ranging from 50 to 75 mJ cm...

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Autores: Queraltó López, Albert, Pérez del Pino, Ángel|||0000-0002-1405-6027, De La Mata, Maria|||0000-0002-1581-4838, Tristany, Mar, Obradors, Xavier|||0000-0003-4592-7718, Puig i Molina, Mª Teresa|||0000-0002-1873-0488, Trolier-McKinstry, Susan
Tipo de recurso: artículo
Fecha de publicación:2016
País:España
Institución:Universitat Autònoma de Barcelona
Repositorio:Dipòsit Digital de Documents de la UAB
Idioma:inglés
OAI Identifier:oai:ddd.uab.cat:195337
Acceso en línea:https://ddd.uab.cat/record/195337
https://dx.doi.org/urn:doi:10.1016/j.ceramint.2015.11.075
Access Level:acceso abierto
Palabra clave:A. Films
A. Sol-gel processes
Laser crystallization
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spelling Ultraviolet pulsed laser crystallization of Ba0.8Sr0.2TiO3 films on LaNiO3-coated silicon substratesQueraltó López, AlbertPérez del Pino, Ángel|||0000-0002-1405-6027De La Mata, Maria|||0000-0002-1581-4838Tristany, MarObradors, Xavier|||0000-0003-4592-7718Puig i Molina, Mª Teresa|||0000-0002-1873-0488Trolier-McKinstry, SusanA. FilmsA. Sol-gel processesLaser crystallizationIn this work, BaSrTiO (BST) films on LaNiO-buffered SiO/Si (LNO/SiO/Si) substrates were crystallized by pulsed laser irradiation. Solution-derived amorphous barium-strontium-titanate precursor layers were crystallized with a KrF excimer laser in oxygen ambient at fluences ranging from 50 to 75 mJ cm. With the substrate temperature set to 500 °C, the number of pulses and film thickness were varied until high-quality crystallinity could be achieved. It was found that films with a thickness of 40 nm are fully crystallized with a uniaxial {00l} orientation which is predetermined by the LaNiO orientation. On the other hand, for 160 nm thick films, crystallization was observed after 12,000 pulses in the 70 nm close to the surface, while the rest of the film remained amorphous. The large temperature difference between the film surface and interface due to the low thermal conductivity of the amorphous BST is suggested as the origin of this behavior. Films thicker than 80 nm cracked on crystallization due to the stress caused by the different thermal expansion coefficients of film and substrate, as well as the large temperature variations within the BST film. 22016-01-0120162016-01-01Articlehttp://purl.org/coar/resource_type/c_6501AMhttp://purl.org/coar/version/c_ab4af688f83e57aainfo:eu-repo/semantics/articleapplication/pdfhttps://ddd.uab.cat/record/195337https://dx.doi.org/urn:doi:10.1016/j.ceramint.2015.11.075reponame:Dipòsit Digital de Documents de la UABinstname:Universitat Autònoma de BarcelonaInglésengAgència de Gestió d'Ajuts Universitaris i de Recerca https://doi.org/10.13039/501100003030 2015/SGR-753Ministerio de Economía y Competitividad https://doi.org/10.13039/501100003329 MAT2014-51778-C2-1-RMinisterio de Educación y Ciencia https://doi.org/10.13039/501100003329 CSD2007-00041Ministerio de Ciencia e Innovación https://doi.org/10.13039/501100004837 MAT2011-28874-C02-01Ministerio de Economía y Competitividad https://doi.org/10.13039/501100003329 ENE2014-56109-C3-3-Ropen accesshttp://purl.org/coar/access_right/c_abf2Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, i la comunicació pública de l'obra, sempre que no sigui amb finalitats comercials, i sempre que es reconegui l'autoria de l'obra original. No es permet la creació d'obres derivades.https://creativecommons.org/licenses/by-nc-nd/4.0/info:eu-repo/semantics/openAccessoai:ddd.uab.cat:1953372026-06-06T12:50:31Z
dc.title.none.fl_str_mv Ultraviolet pulsed laser crystallization of Ba0.8Sr0.2TiO3 films on LaNiO3-coated silicon substrates
title Ultraviolet pulsed laser crystallization of Ba0.8Sr0.2TiO3 films on LaNiO3-coated silicon substrates
spellingShingle Ultraviolet pulsed laser crystallization of Ba0.8Sr0.2TiO3 films on LaNiO3-coated silicon substrates
Queraltó López, Albert
A. Films
A. Sol-gel processes
Laser crystallization
title_short Ultraviolet pulsed laser crystallization of Ba0.8Sr0.2TiO3 films on LaNiO3-coated silicon substrates
title_full Ultraviolet pulsed laser crystallization of Ba0.8Sr0.2TiO3 films on LaNiO3-coated silicon substrates
title_fullStr Ultraviolet pulsed laser crystallization of Ba0.8Sr0.2TiO3 films on LaNiO3-coated silicon substrates
title_full_unstemmed Ultraviolet pulsed laser crystallization of Ba0.8Sr0.2TiO3 films on LaNiO3-coated silicon substrates
title_sort Ultraviolet pulsed laser crystallization of Ba0.8Sr0.2TiO3 films on LaNiO3-coated silicon substrates
dc.creator.none.fl_str_mv Queraltó López, Albert
Pérez del Pino, Ángel|||0000-0002-1405-6027
De La Mata, Maria|||0000-0002-1581-4838
Tristany, Mar
Obradors, Xavier|||0000-0003-4592-7718
Puig i Molina, Mª Teresa|||0000-0002-1873-0488
Trolier-McKinstry, Susan
author Queraltó López, Albert
author_facet Queraltó López, Albert
Pérez del Pino, Ángel|||0000-0002-1405-6027
De La Mata, Maria|||0000-0002-1581-4838
Tristany, Mar
Obradors, Xavier|||0000-0003-4592-7718
Puig i Molina, Mª Teresa|||0000-0002-1873-0488
Trolier-McKinstry, Susan
author_role author
author2 Pérez del Pino, Ángel|||0000-0002-1405-6027
De La Mata, Maria|||0000-0002-1581-4838
Tristany, Mar
Obradors, Xavier|||0000-0003-4592-7718
Puig i Molina, Mª Teresa|||0000-0002-1873-0488
Trolier-McKinstry, Susan
author2_role author
author
author
author
author
author
dc.subject.none.fl_str_mv A. Films
A. Sol-gel processes
Laser crystallization
topic A. Films
A. Sol-gel processes
Laser crystallization
description In this work, BaSrTiO (BST) films on LaNiO-buffered SiO/Si (LNO/SiO/Si) substrates were crystallized by pulsed laser irradiation. Solution-derived amorphous barium-strontium-titanate precursor layers were crystallized with a KrF excimer laser in oxygen ambient at fluences ranging from 50 to 75 mJ cm. With the substrate temperature set to 500 °C, the number of pulses and film thickness were varied until high-quality crystallinity could be achieved. It was found that films with a thickness of 40 nm are fully crystallized with a uniaxial {00l} orientation which is predetermined by the LaNiO orientation. On the other hand, for 160 nm thick films, crystallization was observed after 12,000 pulses in the 70 nm close to the surface, while the rest of the film remained amorphous. The large temperature difference between the film surface and interface due to the low thermal conductivity of the amorphous BST is suggested as the origin of this behavior. Films thicker than 80 nm cracked on crystallization due to the stress caused by the different thermal expansion coefficients of film and substrate, as well as the large temperature variations within the BST film.
publishDate 2016
dc.date.none.fl_str_mv 2
2016-01-01
2016
2016-01-01
dc.type.none.fl_str_mv Article
http://purl.org/coar/resource_type/c_6501
AM
http://purl.org/coar/version/c_ab4af688f83e57aa
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://ddd.uab.cat/record/195337
https://dx.doi.org/urn:doi:10.1016/j.ceramint.2015.11.075
url https://ddd.uab.cat/record/195337
https://dx.doi.org/urn:doi:10.1016/j.ceramint.2015.11.075
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.relation.none.fl_str_mv Agència de Gestió d'Ajuts Universitaris i de Recerca https://doi.org/10.13039/501100003030 2015/SGR-753
Ministerio de Economía y Competitividad https://doi.org/10.13039/501100003329 MAT2014-51778-C2-1-R
Ministerio de Educación y Ciencia https://doi.org/10.13039/501100003329 CSD2007-00041
Ministerio de Ciencia e Innovación https://doi.org/10.13039/501100004837 MAT2011-28874-C02-01
Ministerio de Economía y Competitividad https://doi.org/10.13039/501100003329 ENE2014-56109-C3-3-R
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
https://creativecommons.org/licenses/by-nc-nd/4.0/
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
https://creativecommons.org/licenses/by-nc-nd/4.0/
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.source.none.fl_str_mv reponame:Dipòsit Digital de Documents de la UAB
instname:Universitat Autònoma de Barcelona
instname_str Universitat Autònoma de Barcelona
reponame_str Dipòsit Digital de Documents de la UAB
collection Dipòsit Digital de Documents de la UAB
repository.name.fl_str_mv
repository.mail.fl_str_mv
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