Development of silicon photonic structures for sensing and signal processing

(English) Silicon photonics is the opportunity that one of the most amazing materials in nature, silicon, has offered once its electronic technological possibilities are reaching its limit. The transparency of this material in the near and mid infrared, along with the extensively developed manufactu...

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Detalhes bibliográficos
Autor: Segura García, Daniel
Tipo de documento: tese
Estado:Versão publicada
Data de publicação:2021
País:España
Recursos:CBUC, CESCA
Repositório:TDR. Tesis Doctorales en Red
OAI Identifier:oai:www.tdx.cat:10803/692090
Acesso em linha:http://hdl.handle.net/10803/692090
https://dx.doi.org/10.5821/dissertation-2117-414263
Access Level:Acceso aberto
Palavra-chave:Silicon photonics
Macroporous silicon
Photonic crystals
Gas sensing
Nanotechnology
Nanophotonics
Àrees temàtiques de la UPC::Enginyeria de la telecomunicació
Àrees temàtiques de la UPC::Enginyeria electrònica
535
621.3
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dc.title.none.fl_str_mv Development of silicon photonic structures for sensing and signal processing
title Development of silicon photonic structures for sensing and signal processing
spellingShingle Development of silicon photonic structures for sensing and signal processing
Segura García, Daniel
Silicon photonics
Macroporous silicon
Photonic crystals
Gas sensing
Nanotechnology
Nanophotonics
Àrees temàtiques de la UPC::Enginyeria de la telecomunicació
Àrees temàtiques de la UPC::Enginyeria electrònica
535
621.3
title_short Development of silicon photonic structures for sensing and signal processing
title_full Development of silicon photonic structures for sensing and signal processing
title_fullStr Development of silicon photonic structures for sensing and signal processing
title_full_unstemmed Development of silicon photonic structures for sensing and signal processing
title_sort Development of silicon photonic structures for sensing and signal processing
dc.creator.none.fl_str_mv Segura García, Daniel
author Segura García, Daniel
author_facet Segura García, Daniel
author_role author
dc.contributor.none.fl_str_mv Rodríguez Martínez, Ángel
Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.subject.none.fl_str_mv Silicon photonics
Macroporous silicon
Photonic crystals
Gas sensing
Nanotechnology
Nanophotonics
Àrees temàtiques de la UPC::Enginyeria de la telecomunicació
Àrees temàtiques de la UPC::Enginyeria electrònica
535
621.3
topic Silicon photonics
Macroporous silicon
Photonic crystals
Gas sensing
Nanotechnology
Nanophotonics
Àrees temàtiques de la UPC::Enginyeria de la telecomunicació
Àrees temàtiques de la UPC::Enginyeria electrònica
535
621.3
description (English) Silicon photonics is the opportunity that one of the most amazing materials in nature, silicon, has offered once its electronic technological possibilities are reaching its limit. The transparency of this material in the near and mid infrared, along with the extensively developed manufacturing processes, opens the door to the miniaturisation of complex optical systems used in innumerable applications. Ultra-fast communications with low power consumption or highly selective and sensible sensors are some of the most promising ones. In this thesis the optical properties of silicon have been exploded from two differentiated perspectives: the study of macroporous silicon photonic crystals applied to selective gas detection, and the development of in-house fabrication process for integrated silicon photonic circuits. In the first part of the thesis, devoted to macroporous silicon photonic crystal, efforts have been focused on understanding the multiple sources of distortion of the optical response of the same as well as the improvement of some figures of merit such as bandgap width, quality factor or transmittance. The improvement of these figures of merit could lead to the obtaining of photonic structures with potential selective light filtering market applications, in our case, focused to spectroscopic gas detection. On the other hand, in the second part of the thesis, a prospective work on the development of a standardised in-house fabrication-simulation-measurement process has been performed. In our group, and as far as I now at UPC, there was no previous knowledge on the fabrication of these devices. Therefore, we have had to develop all the fabrication/measurement protocols and measurement tools. With these processes optimized, different resonating optical structures have been obtained with high quality factors and relatively low losses. This thesis opens the door to the in-house fabrication of more complex optical circuits, which can be used to many applications, such as integrated optical gas sensors or beam stirring of THz antennas.
publishDate 2021
dc.date.none.fl_str_mv 2021
2024
2024
dc.type.none.fl_str_mv info:eu-repo/semantics/doctoralThesis
info:eu-repo/semantics/publishedVersion
format doctoralThesis
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/10803/692090
https://dx.doi.org/10.5821/dissertation-2117-414263
url http://hdl.handle.net/10803/692090
https://dx.doi.org/10.5821/dissertation-2117-414263
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.rights.none.fl_str_mv http://creativecommons.org/licenses/by-nc/4.0/
info:eu-repo/semantics/openAccess
rights_invalid_str_mv http://creativecommons.org/licenses/by-nc/4.0/
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 202 p.
application/pdf
dc.publisher.none.fl_str_mv Universitat Politècnica de Catalunya
publisher.none.fl_str_mv Universitat Politècnica de Catalunya
dc.source.none.fl_str_mv TDX (Tesis Doctorals en Xarxa)
reponame:TDR. Tesis Doctorales en Red
instname:CBUC, CESCA
instname_str CBUC, CESCA
reponame_str TDR. Tesis Doctorales en Red
collection TDR. Tesis Doctorales en Red
repository.name.fl_str_mv
repository.mail.fl_str_mv
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spelling Development of silicon photonic structures for sensing and signal processingSegura García, DanielSilicon photonicsMacroporous siliconPhotonic crystalsGas sensingNanotechnologyNanophotonicsÀrees temàtiques de la UPC::Enginyeria de la telecomunicacióÀrees temàtiques de la UPC::Enginyeria electrònica535621.3(English) Silicon photonics is the opportunity that one of the most amazing materials in nature, silicon, has offered once its electronic technological possibilities are reaching its limit. The transparency of this material in the near and mid infrared, along with the extensively developed manufacturing processes, opens the door to the miniaturisation of complex optical systems used in innumerable applications. Ultra-fast communications with low power consumption or highly selective and sensible sensors are some of the most promising ones. In this thesis the optical properties of silicon have been exploded from two differentiated perspectives: the study of macroporous silicon photonic crystals applied to selective gas detection, and the development of in-house fabrication process for integrated silicon photonic circuits. In the first part of the thesis, devoted to macroporous silicon photonic crystal, efforts have been focused on understanding the multiple sources of distortion of the optical response of the same as well as the improvement of some figures of merit such as bandgap width, quality factor or transmittance. The improvement of these figures of merit could lead to the obtaining of photonic structures with potential selective light filtering market applications, in our case, focused to spectroscopic gas detection. On the other hand, in the second part of the thesis, a prospective work on the development of a standardised in-house fabrication-simulation-measurement process has been performed. In our group, and as far as I now at UPC, there was no previous knowledge on the fabrication of these devices. Therefore, we have had to develop all the fabrication/measurement protocols and measurement tools. With these processes optimized, different resonating optical structures have been obtained with high quality factors and relatively low losses. This thesis opens the door to the in-house fabrication of more complex optical circuits, which can be used to many applications, such as integrated optical gas sensors or beam stirring of THz antennas.(Català) La fotónica del silici és l'oportunitat que un dels materials més sorprenents de la naturalesa, el silici, ha ofert una vegada que les seves possibilitats tecnológiques dintre de l'electrónica estan arribant al seu límitº La transparencia d'aquest material en l'infraroig próxim i mitja, juntament amb els processos de fabricació ampliament desenvolupats, obre la porta a la miniaturització de complexos sistemes óptics utilitzats en innombrables aplicacions. Les comunicacions ultrarapides amb baix consum d'energia o els sensors altament selectius i sensibles són algunes de les més prometedores. En aquesta tesi s'han explotat les propietats óptiques del silici des de dues perspectives diferenciades: l'estudi dels cristalls fotónics de silici macroporosos aplicats a la detecció selectiva de gasos, i el desenvolupament d'un procés de fabricació propi per als circuits fotónics integrats de silici. En la primera part de la tesi, dedicada al cristall fotónic de silici macroporoso, els esforços s'han centrat en la comprensió de les múltiples fonts de distorsió de la resposta óptica d'aquest, així com en la millora d'algunes figures de merit com l'augment del bloqueig de les bandes laterals, el factor de qualitat o la transmitancia. La millora d'aquestes figures de merit podria conduir a l'obtenció d'estructures fotóniques amb possibles aplicacions en el mercat de filtrat selectiu de llum infraroja, en el nostre cas, enfocades a la detecció espectroscópica de gasos. D'altra banda, en la segona part de la tesi s'ha fet un treball prospectiu sobre el desenvolupament d'un procés normalitzat de fabricació-simulació-mesurament propi. Al nostre grup, i dintre del nostre coneixement, a la UPC, no hi havia cap experiencia previa sobre la fabricació d'aquests dispositius Per tant, hem hagut de desenvolupar tant els protocols de fabricació/mesurament com les eines de mesura. Amb aquests processos optimitzats, s'han obtingut diferents estructures óptiques ressonants amb alts factors de qualitat i perdues relativament baixes. Aquesta tesi obre la porta a la fabricació propia de circuits óptics més complexos, que poden utilitzar-se per a moltes aplicacions, com els sensors óptics de gas integrats o l'agitació de feix d'antenes THz.DOCTORAT EN ENGINYERIA ELECTRÒNICA (Pla 2013)Universitat Politècnica de CatalunyaRodríguez Martínez, ÁngelUniversitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica202420242021info:eu-repo/semantics/doctoralThesisinfo:eu-repo/semantics/publishedVersion202 p.application/pdfhttp://hdl.handle.net/10803/692090https://dx.doi.org/10.5821/dissertation-2117-414263TDX (Tesis Doctorals en Xarxa)reponame:TDR. Tesis Doctorales en Redinstname:CBUC, CESCAInglésL'accés als continguts d'aquesta tesi queda condicionat a l'acceptació de les condicions d'ús establertes per la següent llicència Creative Commons: http://creativecommons.org/licenses/by-nc/4.0/http://creativecommons.org/licenses/by-nc/4.0/info:eu-repo/semantics/openAccessoai:www.tdx.cat:10803/6920902026-06-14T12:46:07Z
score 15.811543

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