Process technology to integrate polycrystalline uncooled PbSe infrared detectors on interference filters

Paper presented at the Conference on Detectors and Associated Signal Processing, part of the Optical Systems Design Symposium, held in St. Etienne, France (September 30 – October 3, 2003). Included in the proceedings volume: Proceedings of SPIE - The International Society for Optical Engineering, Vo...

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Autores: Rodrigo, Maria Teresa, Diezhandino, J., Vergara, Germán, Pérez Álvarez-Quiñones, Gloria, Torquemada, M. C., Sánchez, F. J., Villamayor, Víctor, Almazán, Rosa, Verdú, Marina, Génova, Inés, Rodríguez, Purificación, Gómez. Luis Jorge, Catalán, Irene, Plaza, Julio, Montojo, María Teresa
Tipo de recurso: artículo
Estado:Versión aceptada para publicación
Fecha de publicación:2004
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/416205
Acceso en línea:http://hdl.handle.net/10261/416205
https://api.elsevier.com/content/abstract/scopus_id/11144357672
Access Level:acceso abierto
Palabra clave:Focal plane arrays
Infrared
Lead selenide
Uncooled
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spelling Process technology to integrate polycrystalline uncooled PbSe infrared detectors on interference filtersRodrigo, Maria TeresaDiezhandino, J.Vergara, GermánPérez Álvarez-Quiñones, GloriaTorquemada, M. C.Sánchez, F. J.Villamayor, VíctorAlmazán, RosaVerdú, MarinaGénova, InésRodríguez, PurificaciónGómez. Luis JorgeCatalán, IrenePlaza, JulioMontojo, María TeresaFocal plane arraysInfraredLead selenideUncooledPaper presented at the Conference on Detectors and Associated Signal Processing, part of the Optical Systems Design Symposium, held in St. Etienne, France (September 30 – October 3, 2003). Included in the proceedings volume: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 5251.A technology to process uncooled polycrystalline PbSe IR detectors on interference filters has been developed. Thus, the lead salt natural spectral response can be modified as required. PbSe is deposited, processed and sensitized, following a unique method, on an interference filter made up of a sapphire or silicon substrate and a Ge/SiO multilayer structure. Unlike standard polycrystalline PbSe processing methods, we deposit PbSe by sublimation in vacuum. As-deposited, PbSe is not sensitive to infrared light. In order to turn it photosensitive it is necessary to expose the films to specific thermal treatments. We have developed a very efficient sensitization process during which substrates are submitted to temperatures as high as 450 °C. In this work we demonstrate that we are able to process a PbSe detector directly on top of an interference filter. Also, we present preliminary results regarding the compatibility of our technology with standard photolithography and dry etch techniques. Results obtained pave the way for the development of uncooled multicolor medium-wave infrared detectors.This work has been supported by the Spanish Ministry of Defense. Program: DN 8834.Peer reviewedSPIE digital libraryMinisterio de Defensa (España)Pérez Álvarez-Quiñones, Gloria [0000-0001-9268-5964]202620262004info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501Postprintinfo:eu-repo/semantics/acceptedVersionhttp://hdl.handle.net/10261/416205https://api.elsevier.com/content/abstract/scopus_id/11144357672reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)InglésProceedings of SPIE the International Society for Optical Engineeringhttps://doi.org/10.1117/12.512601Noinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/4162052026-05-22T06:33:51Z
dc.title.none.fl_str_mv Process technology to integrate polycrystalline uncooled PbSe infrared detectors on interference filters
title Process technology to integrate polycrystalline uncooled PbSe infrared detectors on interference filters
spellingShingle Process technology to integrate polycrystalline uncooled PbSe infrared detectors on interference filters
Rodrigo, Maria Teresa
Focal plane arrays
Infrared
Lead selenide
Uncooled
title_short Process technology to integrate polycrystalline uncooled PbSe infrared detectors on interference filters
title_full Process technology to integrate polycrystalline uncooled PbSe infrared detectors on interference filters
title_fullStr Process technology to integrate polycrystalline uncooled PbSe infrared detectors on interference filters
title_full_unstemmed Process technology to integrate polycrystalline uncooled PbSe infrared detectors on interference filters
title_sort Process technology to integrate polycrystalline uncooled PbSe infrared detectors on interference filters
dc.creator.none.fl_str_mv Rodrigo, Maria Teresa
Diezhandino, J.
Vergara, Germán
Pérez Álvarez-Quiñones, Gloria
Torquemada, M. C.
Sánchez, F. J.
Villamayor, Víctor
Almazán, Rosa
Verdú, Marina
Génova, Inés
Rodríguez, Purificación
Gómez. Luis Jorge
Catalán, Irene
Plaza, Julio
Montojo, María Teresa
author Rodrigo, Maria Teresa
author_facet Rodrigo, Maria Teresa
Diezhandino, J.
Vergara, Germán
Pérez Álvarez-Quiñones, Gloria
Torquemada, M. C.
Sánchez, F. J.
Villamayor, Víctor
Almazán, Rosa
Verdú, Marina
Génova, Inés
Rodríguez, Purificación
Gómez. Luis Jorge
Catalán, Irene
Plaza, Julio
Montojo, María Teresa
author_role author
author2 Diezhandino, J.
Vergara, Germán
Pérez Álvarez-Quiñones, Gloria
Torquemada, M. C.
Sánchez, F. J.
Villamayor, Víctor
Almazán, Rosa
Verdú, Marina
Génova, Inés
Rodríguez, Purificación
Gómez. Luis Jorge
Catalán, Irene
Plaza, Julio
Montojo, María Teresa
author2_role author
author
author
author
author
author
author
author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv Ministerio de Defensa (España)
Pérez Álvarez-Quiñones, Gloria [0000-0001-9268-5964]
dc.subject.none.fl_str_mv Focal plane arrays
Infrared
Lead selenide
Uncooled
topic Focal plane arrays
Infrared
Lead selenide
Uncooled
description Paper presented at the Conference on Detectors and Associated Signal Processing, part of the Optical Systems Design Symposium, held in St. Etienne, France (September 30 – October 3, 2003). Included in the proceedings volume: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 5251.
publishDate 2004
dc.date.none.fl_str_mv 2004
2026
2026
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
Postprint
info:eu-repo/semantics/acceptedVersion
format article
status_str acceptedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/416205
https://api.elsevier.com/content/abstract/scopus_id/11144357672
url http://hdl.handle.net/10261/416205
https://api.elsevier.com/content/abstract/scopus_id/11144357672
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv Proceedings of SPIE the International Society for Optical Engineering
https://doi.org/10.1117/12.512601
No
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv SPIE digital library
publisher.none.fl_str_mv SPIE digital library
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15.812429

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