Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry

Under the terms of the Creative Commons Attribution (CC BY) license to their work.

Detalles Bibliográficos
Autores: Chávez-Angel, Emigdio, Reparaz, J. S., Gomis-Bresco, J., Wagner, M. R., Cuffe, John, Graczykowski, Bartlomiej, Shchepetov, A., Jiang, H., Prunnila, M., Ahopelto, Jouni, Alzina, Francesc, Sotomayor Torres, C. M.
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2014
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/127169
Acceso en línea:http://hdl.handle.net/10261/127169
Access Level:acceso abierto
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spelling Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometryChávez-Angel, EmigdioReparaz, J. S.Gomis-Bresco, J.Wagner, M. R.Cuffe, JohnGraczykowski, BartlomiejShchepetov, A.Jiang, H.Prunnila, M.Ahopelto, JouniAlzina, FrancescSotomayor Torres, C. M.Under the terms of the Creative Commons Attribution (CC BY) license to their work.We report on the reduction of the thermal conductivity in ultra-thin suspended Si membranes with high crystalline quality. A series of membranes with thicknesses ranging from 9 nm to 1.5 μm was investigated using Raman thermometry, a novel contactless technique for thermal conductivity determination. A systematic decrease in the thermal conductivity was observed as reducing the thickness, which is explained using the Fuchs-Sondheimer model through the influence of phonon boundary scattering at the surfaces. The thermal conductivity of the thinnest membrane with d = 9 nm resulted in (9 ± 2) W/mK, thus approaching the amorphous limit but still maintaining a high crystalline quality.The authors acknowledge the financial support from the FP7 project MERGING (Grant No. 309150), the Spanish MICINN projects nanoTHERM (Grant No. CSD2010–0044), TAPHOR (MAT2012–31392), and the Academy of Finland (Grant No. 252598). E.C.-A. gratefully acknowledges a Becas Chile 2010 CONICYT fellowship from Chilean government.Peer ReviewedAmerican Institute of PhysicsMinisterio de Ciencia e Innovación (España)Academy of FinlandComisión Nacional de Investigación Científica y Tecnológica (Chile)European CommissionConsejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]2015201520142015info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501Publisher's versioninfo:eu-repo/semantics/publishedVersionhttp://hdl.handle.net/10261/127169reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Inglés#PLACEHOLDER_PARENT_METADATA_VALUE#info:eu-repo/grantAgreement/EC/FP7/309150http://dx.doi.org/10.1063/1.4861796Síinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/1271692026-05-22T06:33:51Z
dc.title.none.fl_str_mv Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry
title Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry
spellingShingle Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry
Chávez-Angel, Emigdio
title_short Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry
title_full Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry
title_fullStr Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry
title_full_unstemmed Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry
title_sort Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry
dc.creator.none.fl_str_mv Chávez-Angel, Emigdio
Reparaz, J. S.
Gomis-Bresco, J.
Wagner, M. R.
Cuffe, John
Graczykowski, Bartlomiej
Shchepetov, A.
Jiang, H.
Prunnila, M.
Ahopelto, Jouni
Alzina, Francesc
Sotomayor Torres, C. M.
author Chávez-Angel, Emigdio
author_facet Chávez-Angel, Emigdio
Reparaz, J. S.
Gomis-Bresco, J.
Wagner, M. R.
Cuffe, John
Graczykowski, Bartlomiej
Shchepetov, A.
Jiang, H.
Prunnila, M.
Ahopelto, Jouni
Alzina, Francesc
Sotomayor Torres, C. M.
author_role author
author2 Reparaz, J. S.
Gomis-Bresco, J.
Wagner, M. R.
Cuffe, John
Graczykowski, Bartlomiej
Shchepetov, A.
Jiang, H.
Prunnila, M.
Ahopelto, Jouni
Alzina, Francesc
Sotomayor Torres, C. M.
author2_role author
author
author
author
author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv Ministerio de Ciencia e Innovación (España)
Academy of Finland
Comisión Nacional de Investigación Científica y Tecnológica (Chile)
European Commission
Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]
description Under the terms of the Creative Commons Attribution (CC BY) license to their work.
publishDate 2014
dc.date.none.fl_str_mv 2014
2015
2015
2015
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
Publisher's version
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/127169
url http://hdl.handle.net/10261/127169
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv #PLACEHOLDER_PARENT_METADATA_VALUE#
info:eu-repo/grantAgreement/EC/FP7/309150
http://dx.doi.org/10.1063/1.4861796
Sí
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv American Institute of Physics
publisher.none.fl_str_mv American Institute of Physics
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15.811543

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