Real-time characterization of dielectric charging in contactless capacitive MEMS
This paper presents a new method to characterize the dynamics of the charge trapped in the dielectric layer of contactless microelectromechanical systems. For sampled-time systems, this allows knowing the state of the net charge at each sampling time without distorting the measurement. This approach...
| Autores: | , , , , , |
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| Tipo de recurso: | artículo |
| Fecha de publicación: | 2015 |
| País: | España |
| Institución: | Universitat Politècnica de Catalunya (UPC) |
| Repositorio: | UPCommons. Portal del coneixement obert de la UPC |
| Idioma: | inglés |
| OAI Identifier: | oai:upcommons.upc.edu:2117/27244 |
| Acceso en línea: | https://hdl.handle.net/2117/27244 https://dx.doi.org/10.1007/s10470-014-0458-y |
| Access Level: | acceso abierto |
| Palabra clave: | Nanoelectronics MEMS reliability Dielectric charge dynamics Dielectric charge characterization Dielectric charge control SWITCHES Nanoelectrònica Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Processament del senyal::Adquisició i detecció del senyal |
| Sumario: | This paper presents a new method to characterize the dynamics of the charge trapped in the dielectric layer of contactless microelectromechanical systems. For sampled-time systems, this allows knowing the state of the net charge at each sampling time without distorting the measurement. This approach allows one to model the expected behaviour of dielectric charging as a response to a sigma-delta control of charge. The goodness of the proposed approach is obtained by matching the experimentally obtained closed loop response with the one predicted using the proposed characterization method. The characterization method also provides a criterion to avoid nonlinear effects, such as fractal-like behaviour, in charge control. |
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