Impact of La Concentration on Ferroelectricity of La-Doped HfO2 Epitaxial Thin Films

Epitaxial thin films of HfO2 doped with La have been grown on SrTiO3(001) and Si(001), and the impact of the La concentration on the stabilization of the ferroelectric phase has been determined. Films with 2-5 at. % La doping present the least amount of paraelectric monoclinic and cubic phases and e...

Descripción completa

Detalles Bibliográficos
Autores: Song, Tingfeng, Tan, Huan, Bachelet, Romain, Saint-Girons, Guillaume, Fina, Ignasi, Sánchez Barrera, Florencio
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2021
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/264649
Acceso en línea:http://hdl.handle.net/10261/264649
https://api.elsevier.com/content/abstract/scopus_id/85118626497
Access Level:acceso abierto
Palabra clave:Epitaxial HfO 2
Epitaxial oxides on silicon
Ferroelectric HfO 2
Ferroelectric oxides
Thin films
Descripción
Sumario:Epitaxial thin films of HfO2 doped with La have been grown on SrTiO3(001) and Si(001), and the impact of the La concentration on the stabilization of the ferroelectric phase has been determined. Films with 2-5 at. % La doping present the least amount of paraelectric monoclinic and cubic phases and exhibit the highest polarization, having a remanent polarization above 20 μC/cm2. The dopant concentration results in an important effect on the coercive field, which is reduced with increasing La content. Combined high polarization, high retention, and high endurance of at least 1010 cycles is obtained in 5 at. % La-doped films.