SiGe nanowire arrays based thermoelectric microgenerator
Thermoelectric micro/nanogenerators (µTEGs) are potential candidates as energy harvesters to power IoT sensors. This study reports on a thermoelectric micro/nanogenerator with a planar architecture built by silicon micromachining technologies that uses silicon-germanium (SiGe) nanowire (NW) arrays a...
| Autores: | , , , , , , , , |
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| Formato: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2019 |
| País: | España |
| Recursos: | Consejo Superior de Investigaciones Científicas (CSIC) |
| Repositorio: | DIGITAL.CSIC. Repositorio Institucional del CSIC |
| OAI Identifier: | oai:digital.csic.es:10261/175272 |
| Acesso em linha: | http://hdl.handle.net/10261/175272 |
| Access Level: | acceso abierto |
| Palavra-chave: | SiGe nanowires Thermoelectric micro/nanogenerator MEMS Energyharvesting VLS-CVD |
| Resumo: | Thermoelectric micro/nanogenerators (µTEGs) are potential candidates as energy harvesters to power IoT sensors. This study reports on a thermoelectric micro/nanogenerator with a planar architecture built by silicon micromachining technologies that uses silicon-germanium (SiGe) nanowire (NW) arrays as thermoelectric material. The growth of bottom-up NW arrays by means of Chemical Vapour Deposition - Vapour Liquid Solid growth (CVD-VLS) and their monolithic integration into prefabricated microplatforms are presented. It is shown that SiGe NWs based µTEGs can harvest 7.1 μW/cm2 without any additional heat exchanger, when there is a waste heat source available at a temperature of 200 °C. Since the required power density for many sensing applications is in the range of 10–100 μW/cm2 the results obtained in this work are close to meet expectations. |
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