Silicon nanopillar arrays with SiO2 overlayer for biosensing application

Bibliographic Details
Authors:	Choudhury, B. Dev, Casquel del Campo, Rafael\|\|\|0000-0003-2433-9159, Bañuls, María José, Sanza Gutiérrez, Francisco Javier, Laguna Heras, Maria Fe\|\|\|0000-0002-1580-4509, Holgado Bolaños, Miguel\|\|\|0000-0001-9299-1371, Puchades, Rosa, Maquieira, Ángel, Angulo Barrios, Carlos\|\|\|0000-0002-2496-5443, Anand, S.
Format:	article
Publication Date:	2014
Country:	España
Institution:	Universidad Politécnica de Madrid
Repository:	Archivo Digital UPM
OAI Identifier:	oai:oa.upm.es:35593
Online Access:	https://oa.upm.es/35593/
Access Level:	Open access
Keyword:	OCIS codes: (040.6040) Silicon (110.4235) Nanolithography (180.3170) Interference microscopy (220.4241) Nanostructure fabrication (260.3160) Interference (280.1415) Biological sensing and sensors (280.4788) Optical sensing and sensors (300.6300) Spectroscopy Fourier transforms (310.1860) Deposition and fabrication.

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