Paper-based ZnO self-powered sensors and nanogenerators by plasma technology

Nanogenerators and self-powered nanosensors have shown the potential to power low-consumption electronics and human-machine interfaces, but their practical implementation requires reliable, environmentally friendly and scalable processes for manufacturing and processing. Furthermore, the emerging fl...

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Autores: García Casas, Xabier, Aparicio Rebollo, Francisco Javier, Budagosky Marcilla, Jorge Alejandro, Ghaffarinejad, Ali, Orozco-Corrales, Noel, Ostrikov, Kostya, Sánchez Valencia, Juan Ramón, Barranco Quero, Ángel, Borrás, Ana
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2023
País:España
Institución:Universidad de Sevilla (US)
Repositorio:idUS. Depósito de Investigación de la Universidad de Sevilla
OAI Identifier:oai:idus.us.es:11441/148602
Acceso en línea:https://hdl.handle.net/11441/148602
https://doi.org/10.1016/j.nanoen.2023.108686
Access Level:acceso abierto
Palabra clave:ZnO
Plasma
Paper
Piezoelectric nanosensor
Piezoelectric nanogenerator
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spelling Paper-based ZnO self-powered sensors and nanogenerators by plasma technologyGarcía Casas, XabierAparicio Rebollo, Francisco JavierBudagosky Marcilla, Jorge AlejandroGhaffarinejad, AliOrozco-Corrales, NoelOstrikov, KostyaSánchez Valencia, Juan RamónBarranco Quero, ÁngelBorrás, AnaZnOPlasmaPaperPiezoelectric nanosensorPiezoelectric nanogeneratorNanogenerators and self-powered nanosensors have shown the potential to power low-consumption electronics and human-machine interfaces, but their practical implementation requires reliable, environmentally friendly and scalable processes for manufacturing and processing. Furthermore, the emerging flexible and wearable electronics technology demands direct fabrication onto innovative substrates such as paper and plastics typically incompatible with high process temperatures. This article presents a plasma synthesis approach for the fabrication of piezoelectric nanogenerators (PENGs) and self-powered sensors on paper substrates. Polycrystalline ZnO nanocolumnar thin films are deposited by plasma-enhanced chemical vapour deposition on common paper supports using a microwave electron cyclotron resonance reactor working at room temperature yielding high growth rates and low structural and interfacial stresses. Applying Kinetic Monte Carlo simulation, we elucidate the basic shadowing mechanism behind the characteristic microstructure and porosity of the ZnO thin films, relating them to an enhanced piezoelectric response to periodic and random inputs. The piezoelectric devices are assembled by embedding the ZnO films in polymethylmethacrylate (PMMA) and using Au thin layers as electrodes in two different configurations, namely laterally and vertically contacted devices. We present the response of the laterally connected devices as a force sensor for low-frequency events with different answers to the applied force depending on the impedance circuit, i.e. load values range, a behaviour that is theoretically analyzed. The characterization of the vertical devices in cantilever-like mode reaches instantaneous power densities of 80 nW/cm2 with a mean power output of 20 nW/cm2. Besides, we analyze their actual-scenario performance by activation with a fan and handwriting. Overall, this work demonstrates the advantages of implementing plasma deposition for piezoelectric films to develop robust, flexible, stretchable, and enhanced-performance nanogenerators and self-powered piezoelectric sensors compatible with inexpensive and recyclable supports.ElsevierFísica Aplicada IFQM196: Nanotecnología en Superficies y PlasmaMCIN/AEI/10.13039/501100011033 and by ERDF (FEDER) PID2019-109603RA-I00MCIN/AEI/10.13039/501100011033 and by ERDF (FEDER) TED2021-130916B-I00MCIN/AEI/10.13039/501100011033 and by ERDF (FEDER) PID2019-110430GB-C21Consejería de Economía, Conocimiento, Empresas y Universidad de la Junta de Andalucía PAIDI-2020 through project US-1381057EU H2020 program under grant agreement 8519292023info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionapplication/pdfapplication/pdfhttps://hdl.handle.net/11441/148602https://doi.org/10.1016/j.nanoen.2023.108686reponame:idUS. Depósito de Investigación de la Universidad de Sevillainstname:Universidad de Sevilla (US)InglésNano Energy, 114 (108686).PID2019-109603RA-I00TED2021-130916B-I00PID2019-110430GB-C21PAIDI-2020 US-1381057EU H2020 851929https://www.sciencedirect.com/science/article/pii/S2211285523005232info:eu-repo/semantics/openAccessoai:idus.us.es:11441/1486022026-06-17T12:51:07Z
dc.title.none.fl_str_mv Paper-based ZnO self-powered sensors and nanogenerators by plasma technology
title Paper-based ZnO self-powered sensors and nanogenerators by plasma technology
spellingShingle Paper-based ZnO self-powered sensors and nanogenerators by plasma technology
García Casas, Xabier
ZnO
Plasma
Paper
Piezoelectric nanosensor
Piezoelectric nanogenerator
title_short Paper-based ZnO self-powered sensors and nanogenerators by plasma technology
title_full Paper-based ZnO self-powered sensors and nanogenerators by plasma technology
title_fullStr Paper-based ZnO self-powered sensors and nanogenerators by plasma technology
title_full_unstemmed Paper-based ZnO self-powered sensors and nanogenerators by plasma technology
title_sort Paper-based ZnO self-powered sensors and nanogenerators by plasma technology
dc.creator.none.fl_str_mv García Casas, Xabier
Aparicio Rebollo, Francisco Javier
Budagosky Marcilla, Jorge Alejandro
Ghaffarinejad, Ali
Orozco-Corrales, Noel
Ostrikov, Kostya
Sánchez Valencia, Juan Ramón
Barranco Quero, Ángel
Borrás, Ana
author García Casas, Xabier
author_facet García Casas, Xabier
Aparicio Rebollo, Francisco Javier
Budagosky Marcilla, Jorge Alejandro
Ghaffarinejad, Ali
Orozco-Corrales, Noel
Ostrikov, Kostya
Sánchez Valencia, Juan Ramón
Barranco Quero, Ángel
Borrás, Ana
author_role author
author2 Aparicio Rebollo, Francisco Javier
Budagosky Marcilla, Jorge Alejandro
Ghaffarinejad, Ali
Orozco-Corrales, Noel
Ostrikov, Kostya
Sánchez Valencia, Juan Ramón
Barranco Quero, Ángel
Borrás, Ana
author2_role author
author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv Física Aplicada I
FQM196: Nanotecnología en Superficies y Plasma
MCIN/AEI/10.13039/501100011033 and by ERDF (FEDER) PID2019-109603RA-I00
MCIN/AEI/10.13039/501100011033 and by ERDF (FEDER) TED2021-130916B-I00
MCIN/AEI/10.13039/501100011033 and by ERDF (FEDER) PID2019-110430GB-C21
Consejería de Economía, Conocimiento, Empresas y Universidad de la Junta de Andalucía PAIDI-2020 through project US-1381057
EU H2020 program under grant agreement 851929
dc.subject.none.fl_str_mv ZnO
Plasma
Paper
Piezoelectric nanosensor
Piezoelectric nanogenerator
topic ZnO
Plasma
Paper
Piezoelectric nanosensor
Piezoelectric nanogenerator
description Nanogenerators and self-powered nanosensors have shown the potential to power low-consumption electronics and human-machine interfaces, but their practical implementation requires reliable, environmentally friendly and scalable processes for manufacturing and processing. Furthermore, the emerging flexible and wearable electronics technology demands direct fabrication onto innovative substrates such as paper and plastics typically incompatible with high process temperatures. This article presents a plasma synthesis approach for the fabrication of piezoelectric nanogenerators (PENGs) and self-powered sensors on paper substrates. Polycrystalline ZnO nanocolumnar thin films are deposited by plasma-enhanced chemical vapour deposition on common paper supports using a microwave electron cyclotron resonance reactor working at room temperature yielding high growth rates and low structural and interfacial stresses. Applying Kinetic Monte Carlo simulation, we elucidate the basic shadowing mechanism behind the characteristic microstructure and porosity of the ZnO thin films, relating them to an enhanced piezoelectric response to periodic and random inputs. The piezoelectric devices are assembled by embedding the ZnO films in polymethylmethacrylate (PMMA) and using Au thin layers as electrodes in two different configurations, namely laterally and vertically contacted devices. We present the response of the laterally connected devices as a force sensor for low-frequency events with different answers to the applied force depending on the impedance circuit, i.e. load values range, a behaviour that is theoretically analyzed. The characterization of the vertical devices in cantilever-like mode reaches instantaneous power densities of 80 nW/cm2 with a mean power output of 20 nW/cm2. Besides, we analyze their actual-scenario performance by activation with a fan and handwriting. Overall, this work demonstrates the advantages of implementing plasma deposition for piezoelectric films to develop robust, flexible, stretchable, and enhanced-performance nanogenerators and self-powered piezoelectric sensors compatible with inexpensive and recyclable supports.
publishDate 2023
dc.date.none.fl_str_mv 2023
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv https://hdl.handle.net/11441/148602
https://doi.org/10.1016/j.nanoen.2023.108686
url https://hdl.handle.net/11441/148602
https://doi.org/10.1016/j.nanoen.2023.108686
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv Nano Energy, 114 (108686).
PID2019-109603RA-I00
TED2021-130916B-I00
PID2019-110430GB-C21
PAIDI-2020 US-1381057
EU H2020 851929
https://www.sciencedirect.com/science/article/pii/S2211285523005232
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.publisher.none.fl_str_mv Elsevier
publisher.none.fl_str_mv Elsevier
dc.source.none.fl_str_mv reponame:idUS. Depósito de Investigación de la Universidad de Sevilla
instname:Universidad de Sevilla (US)
instname_str Universidad de Sevilla (US)
reponame_str idUS. Depósito de Investigación de la Universidad de Sevilla
collection idUS. Depósito de Investigación de la Universidad de Sevilla
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,300724

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