The curious case of thin-body Ge crystallization

Producción Científica

Bibliographic Details
Authors: Duffy, Ray, Shayesteh, M., McCarthy, B., Blake, A., White, M., Scully, J., Yu, R., Kelleher, A. M., Schmidt, M., Petkov, N., Pelaz Montes, María Lourdes, Marqués Cuesta, Luis Alberto
Format: article
Publication Date:2011
Country:España
Institution:Universidad de Valladolid
Repository:UVaDOC. Repositorio Documental de la Universidad de Valladolid
OAI Identifier:oai:uvadoc.uva.es:10324/31962
Online Access:https://doi.org/10.1063/1.3643160
http://uvadoc.uva.es/handle/10324/31962
Access Level:Open access
Keyword:Cristalización
Crystallization
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spelling The curious case of thin-body Ge crystallizationDuffy, RayShayesteh, M.McCarthy, B.Blake, A.White, M.Scully, J.Yu, R.Kelleher, A. M.Schmidt, M.Petkov, N.Pelaz Montes, María LourdesMarqués Cuesta, Luis AlbertoCristalizaciónCrystallizationProducción CientíficaThe authors investigate the templated crystallization of thin-body Ge fin structures with high aspect ratios. Experimental variables include fin thickness and thermal treatments, with fin structures oriented in the 〈110〉 direction. Transmission electron microscopy determined that various crystal defects form during crystallization of amorphous Ge regions, most notably {111} stacking faults, twin boundaries, and small crystallites. In all cases, the nature of the defects is dependent on the fin thickness and thermal treatments applied. Using a standard 600 °C rapid-thermal-anneal, Gestructures with high aspect ratios crystallize with better crystal quality and fewer uncured defects than the equivalent Si case, which is a cause for optimism for thin-film Ge devices.Science Foundation Ireland under Research Grant Nos. 09/SIRG/I1623 and 09/SIRG/I1621.AIP Publishing2011info:eu-repo/semantics/articleapplication/pdfhttps://doi.org/10.1063/1.3643160http://uvadoc.uva.es/handle/10324/31962reponame:UVaDOC. Repositorio Documental de la Universidad de Valladolidinstname:Universidad de ValladolidIngléshttps://aip.scitation.org/doi/10.1063/1.3643160info:eu-repo/semantics/openAccesshttp://creativecommons.org/licenses/by-nc-nd/4.0/oai:uvadoc.uva.es:10324/319622026-06-13T12:44:47Z
dc.title.none.fl_str_mv The curious case of thin-body Ge crystallization
title The curious case of thin-body Ge crystallization
spellingShingle The curious case of thin-body Ge crystallization
Duffy, Ray
Cristalización
Crystallization
title_short The curious case of thin-body Ge crystallization
title_full The curious case of thin-body Ge crystallization
title_fullStr The curious case of thin-body Ge crystallization
title_full_unstemmed The curious case of thin-body Ge crystallization
title_sort The curious case of thin-body Ge crystallization
dc.creator.none.fl_str_mv Duffy, Ray
Shayesteh, M.
McCarthy, B.
Blake, A.
White, M.
Scully, J.
Yu, R.
Kelleher, A. M.
Schmidt, M.
Petkov, N.
Pelaz Montes, María Lourdes
Marqués Cuesta, Luis Alberto
author Duffy, Ray
author_facet Duffy, Ray
Shayesteh, M.
McCarthy, B.
Blake, A.
White, M.
Scully, J.
Yu, R.
Kelleher, A. M.
Schmidt, M.
Petkov, N.
Pelaz Montes, María Lourdes
Marqués Cuesta, Luis Alberto
author_role author
author2 Shayesteh, M.
McCarthy, B.
Blake, A.
White, M.
Scully, J.
Yu, R.
Kelleher, A. M.
Schmidt, M.
Petkov, N.
Pelaz Montes, María Lourdes
Marqués Cuesta, Luis Alberto
author2_role author
author
author
author
author
author
author
author
author
author
author
dc.subject.none.fl_str_mv Cristalización
Crystallization
topic Cristalización
Crystallization
description Producción Científica
publishDate 2011
dc.date.none.fl_str_mv 2011
dc.type.none.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://doi.org/10.1063/1.3643160
http://uvadoc.uva.es/handle/10324/31962
url https://doi.org/10.1063/1.3643160
http://uvadoc.uva.es/handle/10324/31962
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv https://aip.scitation.org/doi/10.1063/1.3643160
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
http://creativecommons.org/licenses/by-nc-nd/4.0/
eu_rights_str_mv openAccess
rights_invalid_str_mv http://creativecommons.org/licenses/by-nc-nd/4.0/
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv AIP Publishing
publisher.none.fl_str_mv AIP Publishing
dc.source.none.fl_str_mv reponame:UVaDOC. Repositorio Documental de la Universidad de Valladolid
instname:Universidad de Valladolid
instname_str Universidad de Valladolid
reponame_str UVaDOC. Repositorio Documental de la Universidad de Valladolid
collection UVaDOC. Repositorio Documental de la Universidad de Valladolid
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,300719

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