High quality factor indium oxide mechanical microresonators
The mechanical resonance behavior of as-grown In_2O_3 microrods has been studied in this work by in-situ scanning electron microscopy (SEM) electrically induced mechanical oscillations. Indium oxide microrods grown by a vapor–solid method are naturally clamped to an aluminum oxide ceramic substrate,...
| Autores: | , , |
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| Tipo de recurso: | artículo |
| Fecha de publicación: | 2015 |
| País: | España |
| Institución: | Universidad Complutense de Madrid (UCM) |
| Repositorio: | Docta Complutense |
| Idioma: | inglés |
| OAI Identifier: | oai:docta.ucm.es:20.500.14352/24308 |
| Acceso en línea: | https://hdl.handle.net/20.500.14352/24308 |
| Access Level: | acceso abierto |
| Palabra clave: | 538.9 Nanomechanical resonators Cantilevers Nanobelts Growth Nanowires Resonance Pressure Diamond Física de materiales Física del estado sólido 2211 Física del Estado Sólido |
| Sumario: | The mechanical resonance behavior of as-grown In_2O_3 microrods has been studied in this work by in-situ scanning electron microscopy (SEM) electrically induced mechanical oscillations. Indium oxide microrods grown by a vapor–solid method are naturally clamped to an aluminum oxide ceramic substrate, showing a high quality factor due to reduced energy losses during mechanical vibrations. Quality factors of more than (10)^5 and minimum detectable forces of the order of (10)^(16) N/Hz^(1/2) demonstrate their potential as mechanical microresonators for real applications. Measurements at low- vacuum using the SEM environmental operation mode were performed to study the effect of extrinsic damping on the resonators behavior. The damping coefficient has been determined as a function of pressure. |
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