A tutorial on mechanical sensors in the 70th anniversary of the piezoresistive effect

An outstanding event related to the understanding of the physics of mechanical sensors occurred and was announced in 1954, exactly seventy years ago. This event was the discovery of the piezoresistive effect, which led to the development of semiconductor strain gauges with a sensitivity much higher...

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Autor: Reverter Cubarsí, Ferran|||0000-0003-1653-0519
Formato: artículo
Fecha de publicación:2024
País:España
Recursos:Universitat Politècnica de Catalunya (UPC)
Repositorio:UPCommons. Portal del coneixement obert de la UPC
Idioma:inglés
OAI Identifier:oai:upcommons.upc.edu:2117/419076
Acesso em linha:https://hdl.handle.net/2117/419076
https://dx.doi.org/10.3390/s24113690
Access Level:acceso abierto
Palavra-chave:Capacitive sensor
Mechanical sensor
MEMS
Piezoelectric effect
Piezoelectric sensor
Piezoresistive effect
Piezoresistor
Strain gauge
Àrees temàtiques de la UPC::Enginyeria electrònica
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spelling A tutorial on mechanical sensors in the 70th anniversary of the piezoresistive effectReverter Cubarsí, Ferran|||0000-0003-1653-0519Capacitive sensorMechanical sensorMEMSPiezoelectric effectPiezoelectric sensorPiezoresistive effectPiezoresistorStrain gaugeÀrees temàtiques de la UPC::Enginyeria electrònicaAn outstanding event related to the understanding of the physics of mechanical sensors occurred and was announced in 1954, exactly seventy years ago. This event was the discovery of the piezoresistive effect, which led to the development of semiconductor strain gauges with a sensitivity much higher than that obtained before in conventional metallic strain gauges. In turn, this motivated the subsequent development of the earliest micromachined silicon devices and the corresponding MEMS devices. The science and technology related to sensors has experienced noteworthy advances in the last decades, but the piezoresistive effect is still the main physical phenomenon behind many mechanical sensors, both commercial and in research models. On this 70th anniversary, this tutorial aims to explain the operating principle, subtypes, input–output characteristics, and limitations of the three main types of mechanical sensor: strain gauges, capacitive sensors, and piezoelectric sensors. These three sensor technologies are also compared with each other, highlighting the main advantages and disadvantages of each one.Peer ReviewedMultidisciplinary Digital Publishing Institute (MDPI)20242024-06-0620242024-11-25journal articlehttp://purl.org/coar/resource_type/c_6501VoRhttp://purl.org/coar/version/c_970fb48d4fbd8a85info:eu-repo/semantics/articleapplication/pdfhttps://hdl.handle.net/2117/419076https://dx.doi.org/10.3390/s24113690reponame:UPCommons. Portal del coneixement obert de la UPCinstname:Universitat Politècnica de Catalunya (UPC)Inglésengopen accesshttp://purl.org/coar/access_right/c_abf2Attribution 4.0 Internationalhttp://creativecommons.org/licenses/by/4.0/info:eu-repo/semantics/openAccessoai:upcommons.upc.edu:2117/4190762026-05-27T15:37:01Z
dc.title.none.fl_str_mv A tutorial on mechanical sensors in the 70th anniversary of the piezoresistive effect
title A tutorial on mechanical sensors in the 70th anniversary of the piezoresistive effect
spellingShingle A tutorial on mechanical sensors in the 70th anniversary of the piezoresistive effect
Reverter Cubarsí, Ferran|||0000-0003-1653-0519
Capacitive sensor
Mechanical sensor
MEMS
Piezoelectric effect
Piezoelectric sensor
Piezoresistive effect
Piezoresistor
Strain gauge
Àrees temàtiques de la UPC::Enginyeria electrònica
title_short A tutorial on mechanical sensors in the 70th anniversary of the piezoresistive effect
title_full A tutorial on mechanical sensors in the 70th anniversary of the piezoresistive effect
title_fullStr A tutorial on mechanical sensors in the 70th anniversary of the piezoresistive effect
title_full_unstemmed A tutorial on mechanical sensors in the 70th anniversary of the piezoresistive effect
title_sort A tutorial on mechanical sensors in the 70th anniversary of the piezoresistive effect
dc.creator.none.fl_str_mv Reverter Cubarsí, Ferran|||0000-0003-1653-0519
author Reverter Cubarsí, Ferran|||0000-0003-1653-0519
author_facet Reverter Cubarsí, Ferran|||0000-0003-1653-0519
author_role author
dc.subject.none.fl_str_mv Capacitive sensor
Mechanical sensor
MEMS
Piezoelectric effect
Piezoelectric sensor
Piezoresistive effect
Piezoresistor
Strain gauge
Àrees temàtiques de la UPC::Enginyeria electrònica
topic Capacitive sensor
Mechanical sensor
MEMS
Piezoelectric effect
Piezoelectric sensor
Piezoresistive effect
Piezoresistor
Strain gauge
Àrees temàtiques de la UPC::Enginyeria electrònica
description An outstanding event related to the understanding of the physics of mechanical sensors occurred and was announced in 1954, exactly seventy years ago. This event was the discovery of the piezoresistive effect, which led to the development of semiconductor strain gauges with a sensitivity much higher than that obtained before in conventional metallic strain gauges. In turn, this motivated the subsequent development of the earliest micromachined silicon devices and the corresponding MEMS devices. The science and technology related to sensors has experienced noteworthy advances in the last decades, but the piezoresistive effect is still the main physical phenomenon behind many mechanical sensors, both commercial and in research models. On this 70th anniversary, this tutorial aims to explain the operating principle, subtypes, input–output characteristics, and limitations of the three main types of mechanical sensor: strain gauges, capacitive sensors, and piezoelectric sensors. These three sensor technologies are also compared with each other, highlighting the main advantages and disadvantages of each one.
publishDate 2024
dc.date.none.fl_str_mv 2024
2024-06-06
2024
2024-11-25
dc.type.none.fl_str_mv journal article
http://purl.org/coar/resource_type/c_6501
VoR
http://purl.org/coar/version/c_970fb48d4fbd8a85
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://hdl.handle.net/2117/419076
https://dx.doi.org/10.3390/s24113690
url https://hdl.handle.net/2117/419076
https://dx.doi.org/10.3390/s24113690
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
Attribution 4.0 International
http://creativecommons.org/licenses/by/4.0/
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
Attribution 4.0 International
http://creativecommons.org/licenses/by/4.0/
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute (MDPI)
publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute (MDPI)
dc.source.none.fl_str_mv reponame:UPCommons. Portal del coneixement obert de la UPC
instname:Universitat Politècnica de Catalunya (UPC)
instname_str Universitat Politècnica de Catalunya (UPC)
reponame_str UPCommons. Portal del coneixement obert de la UPC
collection UPCommons. Portal del coneixement obert de la UPC
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15.811543

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