Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation

ZnO films with Ti atoms incorporated (TZO) in a wide range (0–18 at.%) have been grown by reactive co-sputtering on silicon and glass substrates. The influence of the titanium incorporation in the ZnO matrix on the structural and optical characteristics of the samples has been determined by Rutherfo...

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Autores: Yuste, Miriam, Escobar Galindo, R., Benito, Noelia, Palacio, Carlos, Martínez, O., Albella, J. M., Sánchez Garrido, Olga
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2019
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/178933
Acceso en línea:http://hdl.handle.net/10261/178933
Access Level:acceso abierto
Palabra clave:Ti doped ZnO
Thin film
Co-sputtering
UV-visible
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spelling Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide FormationYuste, MiriamEscobar Galindo, R.Benito, NoeliaPalacio, CarlosMartínez, O.Albella, J. M.Sánchez Garrido, OlgaTi doped ZnOThin filmCo-sputteringUV-visibleZnO films with Ti atoms incorporated (TZO) in a wide range (0–18 at.%) have been grown by reactive co-sputtering on silicon and glass substrates. The influence of the titanium incorporation in the ZnO matrix on the structural and optical characteristics of the samples has been determined by Rutherford backscattering spectroscopy (RBS), X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD). The results indicate that the samples with low Ti content (<4 at.%) exhibit a wurtzite-like structure, with the Ti4+ ions substitutionally incorporated into the ZnO structure, forming Ti-doped ZnO films. In particular, a very low concentration of Ti (<0.9 at.%) leads to a significant increase of the crystallinity of the TZO samples. Higher Ti contents give rise to a progressive amorphization of the wurtzite-like structure, so samples with high Ti content (≥18 at.%) display an amorphous structure, indicating in the XPS analysis, a predominance of Ti–O–Zn mixed oxides. The energy gap obtained from absorption spectrophotometry increases from 3.2 eV for pure ZnO films to 3.6 eV for those with the highest Ti content. Ti incorporation in the ZnO samples <0.9 at.% raises both the blue (380 nm) and green (approx. 550 nm) bands of the photoluminescence (PL) emission, thereby indicating a significant improvement of the PL efficiency of the samplesWe acknowledge financial support from the Comunidad Autónoma de Madrid under project DIMMAT ref: CAM S2013/MIT-2775 and from the Spanish government under the project MAT2015-68892-R.We acknowledge support by the CSIC Open Access Publication Initiative through its Unit of Information Resources for Research (URICI)Peer reviewedMultidisciplinary Digital Publishing InstituteConsejo Superior de Investigaciones Científicas (España)Comunidad de MadridMinisterio de Economía y Competitividad (España)Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]2019201920192019info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501Publisher's versioninfo:eu-repo/semantics/publishedVersionhttp://hdl.handle.net/10261/178933reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Inglés#PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE#info:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/MAT2015-68892-RS2013/MIT-2775/DIMMAT-CMhttp://dx.doi.org/10.3390/coatings9030180Síinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/1789332026-05-22T06:33:51Z
dc.title.none.fl_str_mv Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation
title Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation
spellingShingle Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation
Yuste, Miriam
Ti doped ZnO
Thin film
Co-sputtering
UV-visible
title_short Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation
title_full Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation
title_fullStr Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation
title_full_unstemmed Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation
title_sort Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation
dc.creator.none.fl_str_mv Yuste, Miriam
Escobar Galindo, R.
Benito, Noelia
Palacio, Carlos
Martínez, O.
Albella, J. M.
Sánchez Garrido, Olga
author Yuste, Miriam
author_facet Yuste, Miriam
Escobar Galindo, R.
Benito, Noelia
Palacio, Carlos
Martínez, O.
Albella, J. M.
Sánchez Garrido, Olga
author_role author
author2 Escobar Galindo, R.
Benito, Noelia
Palacio, Carlos
Martínez, O.
Albella, J. M.
Sánchez Garrido, Olga
author2_role author
author
author
author
author
author
dc.contributor.none.fl_str_mv Consejo Superior de Investigaciones Científicas (España)
Comunidad de Madrid
Ministerio de Economía y Competitividad (España)
Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]
dc.subject.none.fl_str_mv Ti doped ZnO
Thin film
Co-sputtering
UV-visible
topic Ti doped ZnO
Thin film
Co-sputtering
UV-visible
description ZnO films with Ti atoms incorporated (TZO) in a wide range (0–18 at.%) have been grown by reactive co-sputtering on silicon and glass substrates. The influence of the titanium incorporation in the ZnO matrix on the structural and optical characteristics of the samples has been determined by Rutherford backscattering spectroscopy (RBS), X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD). The results indicate that the samples with low Ti content (<4 at.%) exhibit a wurtzite-like structure, with the Ti4+ ions substitutionally incorporated into the ZnO structure, forming Ti-doped ZnO films. In particular, a very low concentration of Ti (<0.9 at.%) leads to a significant increase of the crystallinity of the TZO samples. Higher Ti contents give rise to a progressive amorphization of the wurtzite-like structure, so samples with high Ti content (≥18 at.%) display an amorphous structure, indicating in the XPS analysis, a predominance of Ti–O–Zn mixed oxides. The energy gap obtained from absorption spectrophotometry increases from 3.2 eV for pure ZnO films to 3.6 eV for those with the highest Ti content. Ti incorporation in the ZnO samples <0.9 at.% raises both the blue (380 nm) and green (approx. 550 nm) bands of the photoluminescence (PL) emission, thereby indicating a significant improvement of the PL efficiency of the samples
publishDate 2019
dc.date.none.fl_str_mv 2019
2019
2019
2019
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
Publisher's version
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/178933
url http://hdl.handle.net/10261/178933
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv #PLACEHOLDER_PARENT_METADATA_VALUE#
#PLACEHOLDER_PARENT_METADATA_VALUE#
info:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/MAT2015-68892-R
S2013/MIT-2775/DIMMAT-CM
http://dx.doi.org/10.3390/coatings9030180
Sí
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute
publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,812429

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