Advanced oxidation scanning probe lithography

Force microscopy enables a variety of approaches to manipulate and/or modify surfaces. Few of those methods have evolved into advanced probe-based lithographies. Oxidation scanning probe lithography (o-SPL) is the only lithography that enables the direct and resist-less nanoscale patterning of a lar...

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Detalles Bibliográficos
Autores: Ryu, Y. K., García García, Ricardo
Tipo de recurso: artículo
Fecha de publicación:2017
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/147154
Acceso en línea:http://hdl.handle.net/10261/147154
Access Level:acceso abierto
Palabra clave:Scanning probe lithography
Local anodic oxidation
Oxidation SPL
Nanolithography
Nanopatterning
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spelling Advanced oxidation scanning probe lithographyRyu, Y. K.García García, RicardoScanning probe lithographyLocal anodic oxidationOxidation SPLNanolithographyNanopatterningForce microscopy enables a variety of approaches to manipulate and/or modify surfaces. Few of those methods have evolved into advanced probe-based lithographies. Oxidation scanning probe lithography (o-SPL) is the only lithography that enables the direct and resist-less nanoscale patterning of a large variety of materials, from metals to semiconductors; from self-assembled monolayers to biomolecules. Oxidation SPL has also been applied to develop sophisticated electronic and nanomechanical devices such as quantum dots, quantum point contacts, nanowire transistors or mechanical resonators. Here, we review the principles, instrumentation aspects and some device applications of o-SPL. Our focus is to provide a balanced view of the method that introduces the key steps in its evolution, provides some detailed explanations on its fundamentals and presents current trends and applications. To illustrate the capabilities and potential of o-SPL as an alternative lithography we have favored the most recent and updated contributions in nanopatterning and device fabrication.This work was funded by the European Union FP7/2007-2013 under Grant Agreement No. 318804 (SNM) and the Ministerio de Economía y Competitividad (Spain) under grants MAT2013-44858-R, MAT2015-69725-REDT and MAT2016-76507-R.Peer reviewedInstitute of Physics PublishingEuropean CommissionMinisterio de Economía y Competitividad (España)Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]201720172017info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501http://hdl.handle.net/10261/147154reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Español#PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE##PLACEHOLDER_PARENT_METADATA_VALUE#info:eu-repo/grantAgreement/EC/FP7/318804info:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/MAT2013-44858-Rinfo:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/MAT2015-69725-REDTinfo:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/MAT2016-76507-Rhttps://doi.org/10.1088/1361-6528/aa5651Síinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/1471542026-05-22T06:33:51Z
dc.title.none.fl_str_mv Advanced oxidation scanning probe lithography
title Advanced oxidation scanning probe lithography
spellingShingle Advanced oxidation scanning probe lithography
Ryu, Y. K.
Scanning probe lithography
Local anodic oxidation
Oxidation SPL
Nanolithography
Nanopatterning
title_short Advanced oxidation scanning probe lithography
title_full Advanced oxidation scanning probe lithography
title_fullStr Advanced oxidation scanning probe lithography
title_full_unstemmed Advanced oxidation scanning probe lithography
title_sort Advanced oxidation scanning probe lithography
dc.creator.none.fl_str_mv Ryu, Y. K.
García García, Ricardo
author Ryu, Y. K.
author_facet Ryu, Y. K.
García García, Ricardo
author_role author
author2 García García, Ricardo
author2_role author
dc.contributor.none.fl_str_mv European Commission
Ministerio de Economía y Competitividad (España)
Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]
dc.subject.none.fl_str_mv Scanning probe lithography
Local anodic oxidation
Oxidation SPL
Nanolithography
Nanopatterning
topic Scanning probe lithography
Local anodic oxidation
Oxidation SPL
Nanolithography
Nanopatterning
description Force microscopy enables a variety of approaches to manipulate and/or modify surfaces. Few of those methods have evolved into advanced probe-based lithographies. Oxidation scanning probe lithography (o-SPL) is the only lithography that enables the direct and resist-less nanoscale patterning of a large variety of materials, from metals to semiconductors; from self-assembled monolayers to biomolecules. Oxidation SPL has also been applied to develop sophisticated electronic and nanomechanical devices such as quantum dots, quantum point contacts, nanowire transistors or mechanical resonators. Here, we review the principles, instrumentation aspects and some device applications of o-SPL. Our focus is to provide a balanced view of the method that introduces the key steps in its evolution, provides some detailed explanations on its fundamentals and presents current trends and applications. To illustrate the capabilities and potential of o-SPL as an alternative lithography we have favored the most recent and updated contributions in nanopatterning and device fabrication.
publishDate 2017
dc.date.none.fl_str_mv 2017
2017
2017
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
format article
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/147154
url http://hdl.handle.net/10261/147154
dc.language.none.fl_str_mv Español
language_invalid_str_mv Español
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#PLACEHOLDER_PARENT_METADATA_VALUE#
#PLACEHOLDER_PARENT_METADATA_VALUE#
info:eu-repo/grantAgreement/EC/FP7/318804
info:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/MAT2013-44858-R
info:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/MAT2015-69725-REDT
info:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/MAT2016-76507-R
https://doi.org/10.1088/1361-6528/aa5651
Sí
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv Institute of Physics Publishing
publisher.none.fl_str_mv Institute of Physics Publishing
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
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