Peiró, D., Bertomeu i Balagueró, J., Arrando Comas, F., & Andreu i Batallé, J. (1997). Stress measurements in polycrystalline silicon films grown by hot-wire chemical vapor deposition.
Citación estilo ChicagoPeiró, D., Joan Bertomeu i Balagueró, Francesc Arrando Comas, y Jordi Andreu i Batallé. Stress Measurements in Polycrystalline Silicon Films Grown By Hot-wire Chemical Vapor Deposition. 1997.
Cita MLAPeiró, D., Joan Bertomeu i Balagueró, Francesc Arrando Comas, y Jordi Andreu i Batallé. Stress Measurements in Polycrystalline Silicon Films Grown By Hot-wire Chemical Vapor Deposition. 1997.
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