Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation

ZnO films with Ti atoms incorporated (TZO) in a wide range (0–18 at.%) have been grown by reactive co-sputtering on silicon and glass substrates. The influence of the titanium incorporation in the ZnO matrix on the structural and optical characteristics of the samples has been determined by Rutherfo...

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Authors: Yuste, Miriam, Escobar-Galindo, Ramón, Benito, Noelia, Palacio, Carlos, Martínez, Óscar, Albella Martín, José María, Sánchez, Olga
Format: article
Status:Published version
Publication Date:2019
Country:España
Institution:Universidad de Sevilla (US)
Repository:idUS. Depósito de Investigación de la Universidad de Sevilla
OAI Identifier:oai:idus.us.es:11441/93773
Online Access:https://hdl.handle.net/11441/93773
Access Level:Open access
Keyword:Ti doped ZnO
Thin film
Co-sputtering
UV-visible
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spelling Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide FormationYuste, MiriamEscobar-Galindo, RamónBenito, NoeliaPalacio, CarlosMartínez, ÓscarAlbella Martín, José MaríaSánchez, OlgaTi doped ZnOThin filmCo-sputteringUV-visibleZnO films with Ti atoms incorporated (TZO) in a wide range (0–18 at.%) have been grown by reactive co-sputtering on silicon and glass substrates. The influence of the titanium incorporation in the ZnO matrix on the structural and optical characteristics of the samples has been determined by Rutherford backscattering spectroscopy (RBS), X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD). The results indicate that the samples with low Ti content (<4 at.%) exhibit a wurtzite-like structure, with the Ti4+ ions substitutionally incorporated into the ZnO structure, forming Ti-doped ZnO films. In particular, a very low concentration of Ti (<0.9 at.%) leads to a significant increase of the crystallinity of the TZO samples. Higher Ti contents give rise to a progressive amorphization of the wurtzite-like structure, so samples with high Ti content (≥18 at.%) display an amorphous structure, indicating in the XPS analysis, a predominance of Ti–O–Zn mixed oxides. The energy gap obtained from absorption spectrophotometry increases from 3.2 eV for pure ZnO films to 3.6 eV for those with the highest Ti content. Ti incorporation in the ZnO samples <0.9 at.% raises both the blue (380 nm) and green (approx. 550 nm) bands of the photoluminescence (PL) emission, thereby indicating a significant improvement of the PL efficiency of the samples.Comunidad Autónoma de Madrid project DIMMAT ref: CAM S2013/MIT-2775Spanish government project MAT2015-68892-RMDPIFísica Aplicada I2019info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionapplication/pdfapplication/pdfhttps://hdl.handle.net/11441/93773reponame:idUS. Depósito de Investigación de la Universidad de Sevillainstname:Universidad de Sevilla (US)InglésCoatings, 9 (3), 180-.DIMMAT ref: CAM S2013/MIT-2775MAT2015-68892-Rhttps://www.mdpi.com/2079-6412/8/9/321info:eu-repo/semantics/openAccessoai:idus.us.es:11441/937732026-06-17T12:51:07Z
dc.title.none.fl_str_mv Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation
title Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation
spellingShingle Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation
Yuste, Miriam
Ti doped ZnO
Thin film
Co-sputtering
UV-visible
title_short Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation
title_full Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation
title_fullStr Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation
title_full_unstemmed Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation
title_sort Effect of the Incorporation of Titanium on the Optical Properties of ZnO Thin Films: From Doping to Mixed Oxide Formation
dc.creator.none.fl_str_mv Yuste, Miriam
Escobar-Galindo, Ramón
Benito, Noelia
Palacio, Carlos
Martínez, Óscar
Albella Martín, José María
Sánchez, Olga
author Yuste, Miriam
author_facet Yuste, Miriam
Escobar-Galindo, Ramón
Benito, Noelia
Palacio, Carlos
Martínez, Óscar
Albella Martín, José María
Sánchez, Olga
author_role author
author2 Escobar-Galindo, Ramón
Benito, Noelia
Palacio, Carlos
Martínez, Óscar
Albella Martín, José María
Sánchez, Olga
author2_role author
author
author
author
author
author
dc.contributor.none.fl_str_mv Física Aplicada I
dc.subject.none.fl_str_mv Ti doped ZnO
Thin film
Co-sputtering
UV-visible
topic Ti doped ZnO
Thin film
Co-sputtering
UV-visible
description ZnO films with Ti atoms incorporated (TZO) in a wide range (0–18 at.%) have been grown by reactive co-sputtering on silicon and glass substrates. The influence of the titanium incorporation in the ZnO matrix on the structural and optical characteristics of the samples has been determined by Rutherford backscattering spectroscopy (RBS), X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD). The results indicate that the samples with low Ti content (<4 at.%) exhibit a wurtzite-like structure, with the Ti4+ ions substitutionally incorporated into the ZnO structure, forming Ti-doped ZnO films. In particular, a very low concentration of Ti (<0.9 at.%) leads to a significant increase of the crystallinity of the TZO samples. Higher Ti contents give rise to a progressive amorphization of the wurtzite-like structure, so samples with high Ti content (≥18 at.%) display an amorphous structure, indicating in the XPS analysis, a predominance of Ti–O–Zn mixed oxides. The energy gap obtained from absorption spectrophotometry increases from 3.2 eV for pure ZnO films to 3.6 eV for those with the highest Ti content. Ti incorporation in the ZnO samples <0.9 at.% raises both the blue (380 nm) and green (approx. 550 nm) bands of the photoluminescence (PL) emission, thereby indicating a significant improvement of the PL efficiency of the samples.
publishDate 2019
dc.date.none.fl_str_mv 2019
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.none.fl_str_mv https://hdl.handle.net/11441/93773
url https://hdl.handle.net/11441/93773
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv Coatings, 9 (3), 180-.
DIMMAT ref: CAM S2013/MIT-2775
MAT2015-68892-R
https://www.mdpi.com/2079-6412/8/9/321
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
application/pdf
dc.publisher.none.fl_str_mv MDPI
publisher.none.fl_str_mv MDPI
dc.source.none.fl_str_mv reponame:idUS. Depósito de Investigación de la Universidad de Sevilla
instname:Universidad de Sevilla (US)
instname_str Universidad de Sevilla (US)
reponame_str idUS. Depósito de Investigación de la Universidad de Sevilla
collection idUS. Depósito de Investigación de la Universidad de Sevilla
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15.301603

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