Analysis of multifunctional titanium oxycarbide films as a function of oxygen addition

10 páginas, 15 figuras

Detalles Bibliográficos
Autores: Chappé, J. M., Fernandes, A. C., Moura, C., Alves, E., Barradas, N. P., Martin, N., Espinós, J.P., Vaz, F.
Tipo de recurso: artículo
Fecha de publicación:2012
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/78043
Acceso en línea:http://hdl.handle.net/10261/78043
Access Level:acceso abierto
Palabra clave:X-ray photoelectron spectroscopy (XPS)
Carbides
Electrical conductivity
Optical properties
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spelling Analysis of multifunctional titanium oxycarbide films as a function of oxygen additionChappé, J. M.Fernandes, A. C.Moura, C.Alves, E.Barradas, N. P.Martin, N.Espinós, J.P.Vaz, F.X-ray photoelectron spectroscopy (XPS)CarbidesElectrical conductivityOptical properties10 páginas, 15 figurasReactive magnetron sputtering was used to deposit titanium oxycarbide thin films. The overall set of results showed that the oxygen flow rate, and thus the composition of the atmosphere in the deposition chamber, controls the composition of the titanium oxycarbide thin films obtained by reactive sputtering. Rutherford Backscattering Spectroscopy analysis revealed the existence of three major types of films, indexed to their particular composition ratios. A detailed study by X-ray photoelectron spectroscopy was carried out in order to characterize the evolution of the Ti—C, C—O and C—C bonds induced by the increase of the oxygen partial pressure, which was found to be closely related with the different zones of composition that were suggested. Micro-Raman spectroscopy and X-ray diffraction measurements allowed describing the complex nature of the film structure, namely in what concerns different phases and their evolution, texture phenomena and grain size evolution as a function of the particular composition and film types (different zones). Electrical conductivity revealed a transition from a metallic to a semi-conducting behavior as a function of the oxygen concentration in the films, in good agreement with the different zones that were suggested. Similarly, optical properties supported this gradual change and for oxygen contents higher than 67 at.%, the films exhibited typical reflectance of insulator materials (interferences) in the UV, visible and near IR regions.This research is sponsored by FEDER funds through the program COMPETE-Programa Operacional Factores de Competitividade and by national funds through FCT-Fundação para a Ciência e a Tecnologia, under the project PTDC/CTM-NAN/112574/2009.Peer reviewedElsevier201320132012info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501http://hdl.handle.net/10261/78043reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Ingléshttp://dx.doi.org/10.1016/j.surfcoat.2011.11.005info:eu-repo/semantics/openAccessoai:digital.csic.es:10261/780432026-05-22T06:33:51Z
dc.title.none.fl_str_mv Analysis of multifunctional titanium oxycarbide films as a function of oxygen addition
title Analysis of multifunctional titanium oxycarbide films as a function of oxygen addition
spellingShingle Analysis of multifunctional titanium oxycarbide films as a function of oxygen addition
Chappé, J. M.
X-ray photoelectron spectroscopy (XPS)
Carbides
Electrical conductivity
Optical properties
title_short Analysis of multifunctional titanium oxycarbide films as a function of oxygen addition
title_full Analysis of multifunctional titanium oxycarbide films as a function of oxygen addition
title_fullStr Analysis of multifunctional titanium oxycarbide films as a function of oxygen addition
title_full_unstemmed Analysis of multifunctional titanium oxycarbide films as a function of oxygen addition
title_sort Analysis of multifunctional titanium oxycarbide films as a function of oxygen addition
dc.creator.none.fl_str_mv Chappé, J. M.
Fernandes, A. C.
Moura, C.
Alves, E.
Barradas, N. P.
Martin, N.
Espinós, J.P.
Vaz, F.
author Chappé, J. M.
author_facet Chappé, J. M.
Fernandes, A. C.
Moura, C.
Alves, E.
Barradas, N. P.
Martin, N.
Espinós, J.P.
Vaz, F.
author_role author
author2 Fernandes, A. C.
Moura, C.
Alves, E.
Barradas, N. P.
Martin, N.
Espinós, J.P.
Vaz, F.
author2_role author
author
author
author
author
author
author
dc.subject.none.fl_str_mv X-ray photoelectron spectroscopy (XPS)
Carbides
Electrical conductivity
Optical properties
topic X-ray photoelectron spectroscopy (XPS)
Carbides
Electrical conductivity
Optical properties
description 10 páginas, 15 figuras
publishDate 2012
dc.date.none.fl_str_mv 2012
2013
2013
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
format article
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/78043
url http://hdl.handle.net/10261/78043
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv http://dx.doi.org/10.1016/j.surfcoat.2011.11.005
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv Elsevier
publisher.none.fl_str_mv Elsevier
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,81155

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