Differential optical feedback interferometry for the measurement of nanometric displacements
We have recently proposed differential optical feedback interferometry as a convenient method to measure nanometric displacements. In this paper, we present experimental results to support the proposed method. The acquisition system (in particular the conditioning electronics), and, the signal proce...
| Autores: | , , |
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| Tipo de recurso: | artículo |
| Fecha de publicación: | 2014 |
| País: | España |
| Institución: | Universitat Politècnica de Catalunya (UPC) |
| Repositorio: | UPCommons. Portal del coneixement obert de la UPC |
| Idioma: | inglés |
| OAI Identifier: | oai:upcommons.upc.edu:2117/22614 |
| Acceso en línea: | https://hdl.handle.net/2117/22614 https://dx.doi.org/10.7149/OPA.47.1.19 |
| Access Level: | acceso abierto |
| Palabra clave: | Laser interferometry Nanotechnology Differential measurements High resolution Nanometric displacements Optical feedback interferometry Interferometria làser Nanotecnologia Àrees temàtiques de la UPC::Ciències de la visió::Òptica física Àrees temàtiques de la UPC::Enginyeria electrònica::Optoelectrònica |
| Sumario: | We have recently proposed differential optical feedback interferometry as a convenient method to measure nanometric displacements. In this paper, we present experimental results to support the proposed method. The acquisition system (in particular the conditioning electronics), and, the signal processing algorithm applied to the captured signal, will be described. Obtained results show good agreement with measurements performed using a capacitive sensor employed as reference. © Sociedad Española de Óptica. |
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