Kukli, K., Kemell, M., Heikkilä, M. J., Castán Lanaspa, M. H., Dueñas Carazo, S., Mizohata, K., . . . Leskelä, M. (2020). Silicon oxide-niobium oxide mixture films and nanolaminates grown by atomic layer deposition from niobium pentaethoxide and hexakis(ethylamino) disilane.
Citación estilo ChicagoKukli, Kaupo, Marianna Kemell, Mikko J. Heikkilä, María Helena Castán Lanaspa, Salvador Dueñas Carazo, Kenichiro Mizohata, Mikko Ritala, y Markku Leskelä. Silicon Oxide-niobium Oxide Mixture Films and Nanolaminates Grown By Atomic Layer Deposition From Niobium Pentaethoxide and Hexakis(ethylamino) Disilane. 2020.
Cita MLAKukli, Kaupo, et al. Silicon Oxide-niobium Oxide Mixture Films and Nanolaminates Grown By Atomic Layer Deposition From Niobium Pentaethoxide and Hexakis(ethylamino) Disilane. 2020.