In situ time-of-flight mass spectrometry of ionic fragments induced by focused electron beam irradiation: Investigation of electron driven surface chemistry inside an SEM under high vacuum

This article belongs to the Special Issue Nanomaterials Fabricated by Electron-Beam-Induced Deposition and Related Processes.

Detalles Bibliográficos
Autores:	Jurczyk, Jakub, Pillatsch, Lex, Berger, Luisa, Priebe, Agnieszka, Madajska, Katarzyna, Kapusta, Czesław, Szymańska, Iwona B., Michler, Johann, Utke, Ivo
Tipo de recurso:	artículo
Estado:	Versión publicada
Fecha de publicación:	2022
País:	España
Institución:	Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:	DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:	oai:digital.csic.es:10261/303948
Acceso en línea:	http://hdl.handle.net/10261/303948
Access Level:	acceso abierto
Palabra clave:	Ion extractor Metalorganic compounds Mass spectrometry Ice lithography Electron induced fragmentation FEBID (Focused electron beam induced deposition) TOFSIMS (Time-of-flight secondary ions mass spectrometry) Lithography FEBiMS

Descripción
Sumario:	This article belongs to the Special Issue Nanomaterials Fabricated by Electron-Beam-Induced Deposition and Related Processes.