High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation
Ultrasonic systems driven by multi-frequency continuous waves (MFCW) have been used for range distance measurement, offering high accuracy in long and medium range distance estimation. However, the use of continuous waves in very short-distance measurements causes large errors due to multipath refle...
| Authors: | , , , |
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| Format: | article |
| Publication Date: | 2021 |
| Country: | España |
| Institution: | Universitat Autònoma de Barcelona |
| Repository: | Dipòsit Digital de Documents de la UAB |
| Language: | English |
| OAI Identifier: | oai:ddd.uab.cat:256523 |
| Online Access: | https://ddd.uab.cat/record/256523 https://dx.doi.org/urn:doi:10.3390/s21134524 |
| Access Level: | Open access |
| Keyword: | Immersed distance measurement Multi-frequency continuous waves Phase measurement PMUT Time-of-flight Ultrasound |
| Summary: | Ultrasonic systems driven by multi-frequency continuous waves (MFCW) have been used for range distance measurement, offering high accuracy in long and medium range distance estimation. However, the use of continuous waves in very short-distance measurements causes large errors due to multipath reflections. This paper presents a new strategy to estimate very short relative distances with high accuracy based on the use of multi-frequency pulsed waves (MFPW). The proposed strategy allows to avoid the multipath reflections that appear when continuous waves are used, and it improves the achieved accuracy compared to the original MFCW method. To validate it, an 80 µm square AlScN piezoelectric micromachined ultrasonic transducer (PMUT) was chosen as a transmitter while a hydrophone was utilized as a target and receiver, immersed in fluorinert (FC-70) as a propagation medium. Three independent and consecutive tone-burst signals were transmitted successively. The selected frequencies are f1 = 2.3962 MHz, f2 = 2.327 MHz and f3 = 2.1195 MHz, giving first and second-order resolutions of 6.88 and 0.79 µm/°, respectively. Experimental results show a ±6.2 μm measured range error in a range of 3.5 mm, and therefore it represents a good candidate for ultrasound micro-profilometer applications under liquid operation. |
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