Direct mapping of the electric permittivity of heterogeneous non-planar thin films at gigahertz frequencies by scanning microwave microscopy

We obtained maps of electric permittivity at ∼19 GHz frequencies on non-planar thin film heterogeneous samples by means of combined atomic force-scanning microwave microscopy (AFM-SMM). We show that the electric permittivity maps can be obtained directly from the capacitance images acquired in conta...

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Detalles Bibliográficos
Autores: Biagi, Maria Chiara, Badino, Giorgio, Fabregas, Rene, Gramse, Georg, Fumagalli, Laura, 1959-, Gomila Lluch, Gabriel
Tipo de recurso: artículo
Estado:Versión aceptada para publicación
Fecha de publicación:2017
País:España
Institución:Universidad de Barcelona
Repositorio:Dipòsit Digital de la UB
OAI Identifier:oai:diposit.ub.edu:2445/107251
Acceso en línea:https://hdl.handle.net/2445/107251
Access Level:acceso abierto
Palabra clave:Pel·lícules fines
Microscòpia electrònica
Thin films
Electron microscopy
id ES_64a4ff4ebfc7484513e7004e027fc717
oai_identifier_str oai:diposit.ub.edu:2445/107251
network_acronym_str ES
network_name_str España
repository_id_str
spelling Direct mapping of the electric permittivity of heterogeneous non-planar thin films at gigahertz frequencies by scanning microwave microscopyBiagi, Maria ChiaraBadino, GiorgioFabregas, ReneGramse, GeorgFumagalli, Laura, 1959-Gomila Lluch, GabrielPel·lícules finesMicroscòpia electrònicaThin filmsElectron microscopyWe obtained maps of electric permittivity at ∼19 GHz frequencies on non-planar thin film heterogeneous samples by means of combined atomic force-scanning microwave microscopy (AFM-SMM). We show that the electric permittivity maps can be obtained directly from the capacitance images acquired in contact mode, after removing the topographic cross-talk effects. This result demonstrates the possibility of identifying the electric permittivity of different materials in a thin film sample irrespectively of their thickness by just direct imaging and processing. We show, in addition, that quantitative maps of the electric permittivity can be obtained with no need for any theoretical calculation or complex quantification procedures when the electric permittivity of one of the materials is known. To achieve these results the use of contact mode imaging is a key factor. For non-contact imaging modes the effects of local sample thickness and of the imaging distance make the interpretation of the capacitance images in terms of the electric permittivity properties of the materials much more complex. The present results represent a substantial contribution to the field of nanoscale microwave dielectric characterization of thin film materials with important implications for the characterization of novel 3D electronic devices and 3D nanomaterialsRoyal Society of Chemistry2017info:eu-repo/semantics/articleinfo:eu-repo/semantics/acceptedVersionapplication/pdfhttps://hdl.handle.net/2445/107251Articles publicats en revistes (Enginyeria Electrònica i Biomèdica)reponame:Dipòsit Digital de la UBinstname:Universidad de BarcelonaInglésVersió postprint del document publicat a: https://doi.org/10.1039/C6CP08215GPhysical Chemistry Chemical Physics, 2017, vol. 19, p. 3884-3893https://doi.org/10.1039/C6CP08215G(c) Biagi, Maria Chiara et al., 2017info:eu-repo/semantics/openAccessoai:diposit.ub.edu:2445/1072512026-05-27T06:46:51Z
dc.title.none.fl_str_mv Direct mapping of the electric permittivity of heterogeneous non-planar thin films at gigahertz frequencies by scanning microwave microscopy
title Direct mapping of the electric permittivity of heterogeneous non-planar thin films at gigahertz frequencies by scanning microwave microscopy
spellingShingle Direct mapping of the electric permittivity of heterogeneous non-planar thin films at gigahertz frequencies by scanning microwave microscopy
Biagi, Maria Chiara
Pel·lícules fines
Microscòpia electrònica
Thin films
Electron microscopy
title_short Direct mapping of the electric permittivity of heterogeneous non-planar thin films at gigahertz frequencies by scanning microwave microscopy
title_full Direct mapping of the electric permittivity of heterogeneous non-planar thin films at gigahertz frequencies by scanning microwave microscopy
title_fullStr Direct mapping of the electric permittivity of heterogeneous non-planar thin films at gigahertz frequencies by scanning microwave microscopy
title_full_unstemmed Direct mapping of the electric permittivity of heterogeneous non-planar thin films at gigahertz frequencies by scanning microwave microscopy
title_sort Direct mapping of the electric permittivity of heterogeneous non-planar thin films at gigahertz frequencies by scanning microwave microscopy
dc.creator.none.fl_str_mv Biagi, Maria Chiara
Badino, Giorgio
Fabregas, Rene
Gramse, Georg
Fumagalli, Laura, 1959-
Gomila Lluch, Gabriel
author Biagi, Maria Chiara
author_facet Biagi, Maria Chiara
Badino, Giorgio
Fabregas, Rene
Gramse, Georg
Fumagalli, Laura, 1959-
Gomila Lluch, Gabriel
author_role author
author2 Badino, Giorgio
Fabregas, Rene
Gramse, Georg
Fumagalli, Laura, 1959-
Gomila Lluch, Gabriel
author2_role author
author
author
author
author
dc.subject.none.fl_str_mv Pel·lícules fines
Microscòpia electrònica
Thin films
Electron microscopy
topic Pel·lícules fines
Microscòpia electrònica
Thin films
Electron microscopy
description We obtained maps of electric permittivity at ∼19 GHz frequencies on non-planar thin film heterogeneous samples by means of combined atomic force-scanning microwave microscopy (AFM-SMM). We show that the electric permittivity maps can be obtained directly from the capacitance images acquired in contact mode, after removing the topographic cross-talk effects. This result demonstrates the possibility of identifying the electric permittivity of different materials in a thin film sample irrespectively of their thickness by just direct imaging and processing. We show, in addition, that quantitative maps of the electric permittivity can be obtained with no need for any theoretical calculation or complex quantification procedures when the electric permittivity of one of the materials is known. To achieve these results the use of contact mode imaging is a key factor. For non-contact imaging modes the effects of local sample thickness and of the imaging distance make the interpretation of the capacitance images in terms of the electric permittivity properties of the materials much more complex. The present results represent a substantial contribution to the field of nanoscale microwave dielectric characterization of thin film materials with important implications for the characterization of novel 3D electronic devices and 3D nanomaterials
publishDate 2017
dc.date.none.fl_str_mv 2017
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/acceptedVersion
format article
status_str acceptedVersion
dc.identifier.none.fl_str_mv https://hdl.handle.net/2445/107251
url https://hdl.handle.net/2445/107251
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv Versió postprint del document publicat a: https://doi.org/10.1039/C6CP08215G
Physical Chemistry Chemical Physics, 2017, vol. 19, p. 3884-3893
https://doi.org/10.1039/C6CP08215G
dc.rights.none.fl_str_mv (c) Biagi, Maria Chiara et al., 2017
info:eu-repo/semantics/openAccess
rights_invalid_str_mv (c) Biagi, Maria Chiara et al., 2017
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Royal Society of Chemistry
publisher.none.fl_str_mv Royal Society of Chemistry
dc.source.none.fl_str_mv Articles publicats en revistes (Enginyeria Electrònica i Biomèdica)
reponame:Dipòsit Digital de la UB
instname:Universidad de Barcelona
instname_str Universidad de Barcelona
reponame_str Dipòsit Digital de la UB
collection Dipòsit Digital de la UB
repository.name.fl_str_mv
repository.mail.fl_str_mv
_version_ 1869409671784169472
score 15,301603

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