Surface nanostructuring of TiO2 thin films by ion beam irradiation

This work reports a procedure to modify the surface nanostructure of TiO2 anatase thin films through ion beam irradiation with energies in the keV range. Irradiation with N+ ions leads to the formation of a layer with voids at a depth similar to the ion-projected range. By setting the ion-projected...

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Detalles Bibliográficos
Autores: Romero-Gómez, Pablo, Palmero, Alberto, Yubero, Francisco, Vinnichenko, M., Kolitsch, A., González-Elipe, Agustín R.
Tipo de recurso: artículo
Fecha de publicación:2009
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/97686
Acceso en línea:http://hdl.handle.net/10261/97686
Access Level:acceso abierto
Palabra clave:Surface structure
Ion beam irradiation
Nanostructure
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spelling Surface nanostructuring of TiO2 thin films by ion beam irradiationRomero-Gómez, PabloPalmero, AlbertoYubero, FranciscoVinnichenko, M.Kolitsch, A.González-Elipe, Agustín R.Surface structureIon beam irradiationNanostructureThis work reports a procedure to modify the surface nanostructure of TiO2 anatase thin films through ion beam irradiation with energies in the keV range. Irradiation with N+ ions leads to the formation of a layer with voids at a depth similar to the ion-projected range. By setting the ion-projected range a few tens of nanometers below the surface of the film, well-ordered nanorods appear aligned with the angle of incidence of the ion beam. Slightly different results were obtained by using heavier (S+) and lighter (B+) ions under similar conditions. © 2008 Acta Materialia Inc.Peer ReviewedPergamon Press2014201420092014info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501http://hdl.handle.net/10261/97686reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Inglésinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/976862026-05-22T06:33:51Z
dc.title.none.fl_str_mv Surface nanostructuring of TiO2 thin films by ion beam irradiation
title Surface nanostructuring of TiO2 thin films by ion beam irradiation
spellingShingle Surface nanostructuring of TiO2 thin films by ion beam irradiation
Romero-Gómez, Pablo
Surface structure
Ion beam irradiation
Nanostructure
title_short Surface nanostructuring of TiO2 thin films by ion beam irradiation
title_full Surface nanostructuring of TiO2 thin films by ion beam irradiation
title_fullStr Surface nanostructuring of TiO2 thin films by ion beam irradiation
title_full_unstemmed Surface nanostructuring of TiO2 thin films by ion beam irradiation
title_sort Surface nanostructuring of TiO2 thin films by ion beam irradiation
dc.creator.none.fl_str_mv Romero-Gómez, Pablo
Palmero, Alberto
Yubero, Francisco
Vinnichenko, M.
Kolitsch, A.
González-Elipe, Agustín R.
author Romero-Gómez, Pablo
author_facet Romero-Gómez, Pablo
Palmero, Alberto
Yubero, Francisco
Vinnichenko, M.
Kolitsch, A.
González-Elipe, Agustín R.
author_role author
author2 Palmero, Alberto
Yubero, Francisco
Vinnichenko, M.
Kolitsch, A.
González-Elipe, Agustín R.
author2_role author
author
author
author
author
dc.subject.none.fl_str_mv Surface structure
Ion beam irradiation
Nanostructure
topic Surface structure
Ion beam irradiation
Nanostructure
description This work reports a procedure to modify the surface nanostructure of TiO2 anatase thin films through ion beam irradiation with energies in the keV range. Irradiation with N+ ions leads to the formation of a layer with voids at a depth similar to the ion-projected range. By setting the ion-projected range a few tens of nanometers below the surface of the film, well-ordered nanorods appear aligned with the angle of incidence of the ion beam. Slightly different results were obtained by using heavier (S+) and lighter (B+) ions under similar conditions. © 2008 Acta Materialia Inc.
publishDate 2009
dc.date.none.fl_str_mv 2009
2014
2014
2014
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
format article
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/97686
url http://hdl.handle.net/10261/97686
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.publisher.none.fl_str_mv Pergamon Press
publisher.none.fl_str_mv Pergamon Press
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,811543

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