Shallow buried SiN x layers
Copyright (2000) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Journal of Applied Physics 87.1 (2000): 8201-8203 and may be found at h...
| Autores: | , , , , |
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| Tipo de recurso: | artículo |
| Fecha de publicación: | 2000 |
| País: | España |
| Institución: | Universidad Autónoma de Madrid |
| Repositorio: | Biblos-e Archivo. Repositorio Institucional de la UAM |
| Idioma: | inglés |
| OAI Identifier: | oai:repositorio.uam.es:10486/13965 |
| Acceso en línea: | http://hdl.handle.net/10486/13965 |
| Access Level: | acceso abierto |
| Palabra clave: | Física |
| Sumario: | Copyright (2000) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Journal of Applied Physics 87.1 (2000): 8201-8203 and may be found at http://jap.aip.org/ |
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