Phonon attenuation in the GHz regime

Aluminum and PMMA thin film samples are investigated regarding their mechanical properties like speed of sound and attenuation. Aluminum is often used as a transducer layer for pump probe laser measurements and different PMMA types have a large importance in the nanoimprinting technique. The measure...

Descripción completa

Detalles Bibliográficos
Autores: Bryner, Juerg, Kehoe, Timothy|||0000-0002-7051-5910, Vollmann, Jacqueline, Aebi, Laurent, Wenke, Ingo, Dual, Jurg
Tipo de recurso: artículo
Fecha de publicación:2010
País:España
Institución:Universitat Autònoma de Barcelona
Repositorio:Dipòsit Digital de Documents de la UAB
Idioma:inglés
OAI Identifier:oai:ddd.uab.cat:204790
Acceso en línea:https://ddd.uab.cat/record/204790
https://dx.doi.org/urn:doi:10.1016/j.phpro.2010.01.045
Access Level:acceso abierto
Palabra clave:Bulk acoustic waves
Laser acoustics
Phonon attenuation
Thin film metrology
Wave propagation
id ES_5deeed6fba6eb93211de656a34c6aedd
oai_identifier_str oai:ddd.uab.cat:204790
network_acronym_str ES
network_name_str España
repository_id_str
spelling Phonon attenuation in the GHz regimeMeasurements and simulations with a visco-elastic material modelBryner, JuergKehoe, Timothy|||0000-0002-7051-5910Vollmann, JacquelineAebi, LaurentWenke, IngoDual, JurgBulk acoustic wavesLaser acousticsPhonon attenuationThin film metrologyWave propagationAluminum and PMMA thin film samples are investigated regarding their mechanical properties like speed of sound and attenuation. Aluminum is often used as a transducer layer for pump probe laser measurements and different PMMA types have a large importance in the nanoimprinting technique. The measurements are performed on a short pulse laser pump probe setup, where bulk wave packets in the GHz regime are excited and detected using near infrared laser pulses of less than 100 fs duration. This contact-free and non-destructive measurement method is explained. In order to extract the attenuation precisely from the measurements, the entire experimental setup is simulated numerically: The heat distribution and the thermo-elastic wave excitation caused by the laser pulse, the mechanical wave propagation, and the photo-acoustic detection. By means of the visco-elastic modeling of the wave propagation, the simulations are fitted to the measurements by tuning the attenuation parameters in the numerical model. In this way it is possible to extract the attenuation from the measurements. First, two different types of Aluminum on a sapphire substrate are analyzed: Electron beam evaporated Aluminum and sputtered Aluminum, respectively. The thicknesses of the Aluminum films are in the range of 300 nm. It turns out that the attenuation is much higher in the sputtered Aluminum film. Afterwards, PMMA thin films used for nanoimprinting with thicknesses between 300 and 600 nm are analyzed. The PMMA thin films are spincoated onto a Silicon wafer and covered with an Aluminum transducer layer. The very good agreement between the measurements and simulations of the stacked samples allows a reliable determination of the attenuation in the PMMA films in the GHz regime. 22010-01-0120102010-01-01Articlehttp://purl.org/coar/resource_type/c_6501VoRhttp://purl.org/coar/version/c_970fb48d4fbd8a85info:eu-repo/semantics/articleapplication/pdfhttps://ddd.uab.cat/record/204790https://dx.doi.org/urn:doi:10.1016/j.phpro.2010.01.045reponame:Dipòsit Digital de Documents de la UABinstname:Universitat Autònoma de BarcelonaInglésengEuropean Commission https://doi.org/10.13039/501100000780 214249open accesshttp://purl.org/coar/access_right/c_abf2Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, i la comunicació pública de l'obra, sempre que no sigui amb finalitats comercials, i sempre que es reconegui l'autoria de l'obra original. No es permet la creació d'obres derivades.https://creativecommons.org/licenses/by-nc-nd/4.0/info:eu-repo/semantics/openAccessoai:ddd.uab.cat:2047902026-06-06T12:50:31Z
dc.title.none.fl_str_mv Phonon attenuation in the GHz regime
Measurements and simulations with a visco-elastic material model
title Phonon attenuation in the GHz regime
spellingShingle Phonon attenuation in the GHz regime
Bryner, Juerg
Bulk acoustic waves
Laser acoustics
Phonon attenuation
Thin film metrology
Wave propagation
title_short Phonon attenuation in the GHz regime
title_full Phonon attenuation in the GHz regime
title_fullStr Phonon attenuation in the GHz regime
title_full_unstemmed Phonon attenuation in the GHz regime
title_sort Phonon attenuation in the GHz regime
dc.creator.none.fl_str_mv Bryner, Juerg
Kehoe, Timothy|||0000-0002-7051-5910
Vollmann, Jacqueline
Aebi, Laurent
Wenke, Ingo
Dual, Jurg
author Bryner, Juerg
author_facet Bryner, Juerg
Kehoe, Timothy|||0000-0002-7051-5910
Vollmann, Jacqueline
Aebi, Laurent
Wenke, Ingo
Dual, Jurg
author_role author
author2 Kehoe, Timothy|||0000-0002-7051-5910
Vollmann, Jacqueline
Aebi, Laurent
Wenke, Ingo
Dual, Jurg
author2_role author
author
author
author
author
dc.subject.none.fl_str_mv Bulk acoustic waves
Laser acoustics
Phonon attenuation
Thin film metrology
Wave propagation
topic Bulk acoustic waves
Laser acoustics
Phonon attenuation
Thin film metrology
Wave propagation
description Aluminum and PMMA thin film samples are investigated regarding their mechanical properties like speed of sound and attenuation. Aluminum is often used as a transducer layer for pump probe laser measurements and different PMMA types have a large importance in the nanoimprinting technique. The measurements are performed on a short pulse laser pump probe setup, where bulk wave packets in the GHz regime are excited and detected using near infrared laser pulses of less than 100 fs duration. This contact-free and non-destructive measurement method is explained. In order to extract the attenuation precisely from the measurements, the entire experimental setup is simulated numerically: The heat distribution and the thermo-elastic wave excitation caused by the laser pulse, the mechanical wave propagation, and the photo-acoustic detection. By means of the visco-elastic modeling of the wave propagation, the simulations are fitted to the measurements by tuning the attenuation parameters in the numerical model. In this way it is possible to extract the attenuation from the measurements. First, two different types of Aluminum on a sapphire substrate are analyzed: Electron beam evaporated Aluminum and sputtered Aluminum, respectively. The thicknesses of the Aluminum films are in the range of 300 nm. It turns out that the attenuation is much higher in the sputtered Aluminum film. Afterwards, PMMA thin films used for nanoimprinting with thicknesses between 300 and 600 nm are analyzed. The PMMA thin films are spincoated onto a Silicon wafer and covered with an Aluminum transducer layer. The very good agreement between the measurements and simulations of the stacked samples allows a reliable determination of the attenuation in the PMMA films in the GHz regime.
publishDate 2010
dc.date.none.fl_str_mv 2
2010-01-01
2010
2010-01-01
dc.type.none.fl_str_mv Article
http://purl.org/coar/resource_type/c_6501
VoR
http://purl.org/coar/version/c_970fb48d4fbd8a85
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://ddd.uab.cat/record/204790
https://dx.doi.org/urn:doi:10.1016/j.phpro.2010.01.045
url https://ddd.uab.cat/record/204790
https://dx.doi.org/urn:doi:10.1016/j.phpro.2010.01.045
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.relation.none.fl_str_mv European Commission https://doi.org/10.13039/501100000780 214249
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
https://creativecommons.org/licenses/by-nc-nd/4.0/
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
https://creativecommons.org/licenses/by-nc-nd/4.0/
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.source.none.fl_str_mv reponame:Dipòsit Digital de Documents de la UAB
instname:Universitat Autònoma de Barcelona
instname_str Universitat Autònoma de Barcelona
reponame_str Dipòsit Digital de Documents de la UAB
collection Dipòsit Digital de Documents de la UAB
repository.name.fl_str_mv
repository.mail.fl_str_mv
_version_ 1869409066478993408
score 15,300719

Similares en LA Referencia