Surface enhanced Raman spectroscopy by titanium nitride non-continuous thin films

Reactive ultra-high vacuum sputtering of titanium nitride (TiN) films on silicon substrates produces, under certain growth conditions, a non-continuous thin film with a distribution of holes that has an optical extinction coefficient comparable to that of gold nanostructures. The full Raman spectra,...

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Detalles Bibliográficos
Autores: Lorite, I., Serrano Rubio, Aída, Schwartzberg, A., Bueno, J., Costa-Krämer, J. L.
Tipo de recurso: artículo
Estado:Versión aceptada para publicación
Fecha de publicación:2013
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/414092
Acceso en línea:http://hdl.handle.net/10261/414092
https://api.elsevier.com/content/abstract/scopus_id/84875461207
Access Level:acceso abierto
Palabra clave:Sputtering
Surface enhanced Raman spectroscopy
Thin films
Titanium nitride
Descripción
Sumario:Reactive ultra-high vacuum sputtering of titanium nitride (TiN) films on silicon substrates produces, under certain growth conditions, a non-continuous thin film with a distribution of holes that has an optical extinction coefficient comparable to that of gold nanostructures. The full Raman spectra, acquired on different points of the TiN thin film and in comparison to bare silicon substrates, show surface enhanced Raman spectroscopy (SERS) of 40%. TiN, due to the well-known chemical and physical stability in different harsh environments, opens different possibilities in the development of SERS active template. © 2013 Elsevier B.V.