Electrically-inactive phosphorus re-distribution during low temperature annealing

Bibliographic Details
Authors:	Peral Boiza, Ana, Youssef, A., Dastgheib-Shirazi, A., Akey, A., Peters, I.M., Hahn, G., Buonassisi, T., Cañizo Nadal, Carlos del\|\|\|0000-0003-1287-6854
Format:	article
Publication Date:	2017
Country:	España
Institution:	Universidad Politécnica de Madrid
Repository:	Archivo Digital UPM
OAI Identifier:	oai:oa.upm.es:53481
Online Access:	https://oa.upm.es/53481/
Access Level:	Open access
Keyword:	Low Temperature Annealing phosphorus difussion phosphorus emitter

Description
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