Capacitive Sensor for Micrometer-Scale Proximity Detection with Microwaves

This paper presents a highly sensitive proximity sensor with micrometer-scale resolution. The working principle is the change in the capacitance of a movable step-impedance resonator (SIR), in relative (vertical) motion with respect to the static part, a pair of matched lines terminated with a patch...

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Autores: Karami-Horestani, Amirhossein|||0000-0003-4107-8421, Paredes Marco, Ferran|||0000-0002-7252-1169, Adolphs Saura, Karl|||0009-0004-1916-5646, Ebrahimi, Amir|||0000-0002-1787-2230, Martín, Ferran|||0000-0002-1494-9167
Tipo de recurso: artículo
Fecha de publicación:2025
País:España
Institución:Universitat Autònoma de Barcelona
Repositorio:Dipòsit Digital de Documents de la UAB
Idioma:inglés
OAI Identifier:oai:ddd.uab.cat:306116
Acceso en línea:https://ddd.uab.cat/record/306116
https://dx.doi.org/urn:doi:10.1109/JSEN.2025.3527691
Access Level:acceso embargado
Palabra clave:Capacitive sensor
Displacement sensor
Microstrip technology
Microwave sensor
Phase-variation sensor
Proximity sensor
Step-impedance resonator (SIR)
Transmission-mode sensor
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spelling Capacitive Sensor for Micrometer-Scale Proximity Detection with MicrowavesKarami-Horestani, Amirhossein|||0000-0003-4107-8421Paredes Marco, Ferran|||0000-0002-7252-1169Adolphs Saura, Karl|||0009-0004-1916-5646Ebrahimi, Amir|||0000-0002-1787-2230Martín, Ferran|||0000-0002-1494-9167Capacitive sensorDisplacement sensorMicrostrip technologyMicrowave sensorPhase-variation sensorProximity sensorStep-impedance resonator (SIR)Transmission-mode sensorThis paper presents a highly sensitive proximity sensor with micrometer-scale resolution. The working principle is the change in the capacitance of a movable step-impedance resonator (SIR), in relative (vertical) motion with respect to the static part, a pair of matched lines terminated with a patch capacitance and sharing the same axis. If the patches of the lines are aligned with the SIR patches, the resulting structure is a two-port device loaded with a series connected resonator with variable capacitance (caused by the SIR vertical motion). The output signal of the reported proximity sensor is the phase of the transmission coefficient at the operating frequency. Such frequency can (canonically) be the resonance frequency of the SIR when the substrate where such element is etched is in contact with the static part, but the device can be tuned to different operating frequencies, opening the possibility to further enhance the sensitivity. Thus, this transmission-mode phase-variation sensor is a single-frequency device (this simplifies the electronics required for sensor feeding and processing in situations where a vector network analyzer cannot be used). An exhaustive sensitivity analysis for sensor operation at the resonance frequency of the SIR is carried out in the paper. According to such an analysis, it is concluded that for sensitivity (and resolution) optimization, the SIR must be designed with a long narrow strip and small metal patches. Nevertheless, from a simulation-based analysis, it is shown that the sensitivity can be dramatically boosted up by device operation at the frequency where the phase of the transmission coefficient is 180º, provided the static part substrate is adequately chosen. Three prototype proximity sensors are presented and experimentally validated to demonstrate all these aspects. The achieved maximum sensitivity, resolution, and dynamic range in one of such prototypes are 4485º/mm, 5 m, and 0.1 mm, respectively. 220252025-01-0120262026-09-30Articlehttp://purl.org/coar/resource_type/c_6501AMhttp://purl.org/coar/version/c_ab4af688f83e57aainfo:eu-repo/semantics/articleimage/vnd.microsoft.iconhttps://ddd.uab.cat/record/306116https://dx.doi.org/urn:doi:10.1109/JSEN.2025.3527691reponame:Dipòsit Digital de Documents de la UABinstname:Universitat Autònoma de BarcelonaInglésengAgència de Gestió d'Ajuts Universitaris i de Recerca https://doi.org/10.13039/501100003030 2021/SGR-00192Agencia Estatal de Investigación https://doi.org/10.13039/501100011033 PID2022-139181OB-I00Agencia Estatal de Investigación https://doi.org/10.13039/501100011033 PRE2020-093239embargoed accesshttp://purl.org/coar/access_right/c_f1cfAquest material està protegit per drets d'autor i/o drets afins. Podeu utilitzar aquest material en funció del que permet la legislació de drets d'autor i drets afins d'aplicació al vostre cas. Per a d'altres usos heu d'obtenir permís del(s) titular(s) de drets.https://rightsstatements.org/vocab/InC/1.0/info:eu-repo/semantics/embargoedAccessoai:ddd.uab.cat:3061162026-06-06T12:50:31Z
dc.title.none.fl_str_mv Capacitive Sensor for Micrometer-Scale Proximity Detection with Microwaves
title Capacitive Sensor for Micrometer-Scale Proximity Detection with Microwaves
spellingShingle Capacitive Sensor for Micrometer-Scale Proximity Detection with Microwaves
Karami-Horestani, Amirhossein|||0000-0003-4107-8421
Capacitive sensor
Displacement sensor
Microstrip technology
Microwave sensor
Phase-variation sensor
Proximity sensor
Step-impedance resonator (SIR)
Transmission-mode sensor
title_short Capacitive Sensor for Micrometer-Scale Proximity Detection with Microwaves
title_full Capacitive Sensor for Micrometer-Scale Proximity Detection with Microwaves
title_fullStr Capacitive Sensor for Micrometer-Scale Proximity Detection with Microwaves
title_full_unstemmed Capacitive Sensor for Micrometer-Scale Proximity Detection with Microwaves
title_sort Capacitive Sensor for Micrometer-Scale Proximity Detection with Microwaves
dc.creator.none.fl_str_mv Karami-Horestani, Amirhossein|||0000-0003-4107-8421
Paredes Marco, Ferran|||0000-0002-7252-1169
Adolphs Saura, Karl|||0009-0004-1916-5646
Ebrahimi, Amir|||0000-0002-1787-2230
Martín, Ferran|||0000-0002-1494-9167
author Karami-Horestani, Amirhossein|||0000-0003-4107-8421
author_facet Karami-Horestani, Amirhossein|||0000-0003-4107-8421
Paredes Marco, Ferran|||0000-0002-7252-1169
Adolphs Saura, Karl|||0009-0004-1916-5646
Ebrahimi, Amir|||0000-0002-1787-2230
Martín, Ferran|||0000-0002-1494-9167
author_role author
author2 Paredes Marco, Ferran|||0000-0002-7252-1169
Adolphs Saura, Karl|||0009-0004-1916-5646
Ebrahimi, Amir|||0000-0002-1787-2230
Martín, Ferran|||0000-0002-1494-9167
author2_role author
author
author
author
dc.subject.none.fl_str_mv Capacitive sensor
Displacement sensor
Microstrip technology
Microwave sensor
Phase-variation sensor
Proximity sensor
Step-impedance resonator (SIR)
Transmission-mode sensor
topic Capacitive sensor
Displacement sensor
Microstrip technology
Microwave sensor
Phase-variation sensor
Proximity sensor
Step-impedance resonator (SIR)
Transmission-mode sensor
description This paper presents a highly sensitive proximity sensor with micrometer-scale resolution. The working principle is the change in the capacitance of a movable step-impedance resonator (SIR), in relative (vertical) motion with respect to the static part, a pair of matched lines terminated with a patch capacitance and sharing the same axis. If the patches of the lines are aligned with the SIR patches, the resulting structure is a two-port device loaded with a series connected resonator with variable capacitance (caused by the SIR vertical motion). The output signal of the reported proximity sensor is the phase of the transmission coefficient at the operating frequency. Such frequency can (canonically) be the resonance frequency of the SIR when the substrate where such element is etched is in contact with the static part, but the device can be tuned to different operating frequencies, opening the possibility to further enhance the sensitivity. Thus, this transmission-mode phase-variation sensor is a single-frequency device (this simplifies the electronics required for sensor feeding and processing in situations where a vector network analyzer cannot be used). An exhaustive sensitivity analysis for sensor operation at the resonance frequency of the SIR is carried out in the paper. According to such an analysis, it is concluded that for sensitivity (and resolution) optimization, the SIR must be designed with a long narrow strip and small metal patches. Nevertheless, from a simulation-based analysis, it is shown that the sensitivity can be dramatically boosted up by device operation at the frequency where the phase of the transmission coefficient is 180º, provided the static part substrate is adequately chosen. Three prototype proximity sensors are presented and experimentally validated to demonstrate all these aspects. The achieved maximum sensitivity, resolution, and dynamic range in one of such prototypes are 4485º/mm, 5 m, and 0.1 mm, respectively.
publishDate 2025
dc.date.none.fl_str_mv
2
2025
2025-01-01
2026
2026-09-30
dc.type.none.fl_str_mv Article
http://purl.org/coar/resource_type/c_6501
AM
http://purl.org/coar/version/c_ab4af688f83e57aa
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv https://ddd.uab.cat/record/306116
https://dx.doi.org/urn:doi:10.1109/JSEN.2025.3527691
url https://ddd.uab.cat/record/306116
https://dx.doi.org/urn:doi:10.1109/JSEN.2025.3527691
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.relation.none.fl_str_mv Agència de Gestió d'Ajuts Universitaris i de Recerca https://doi.org/10.13039/501100003030 2021/SGR-00192
Agencia Estatal de Investigación https://doi.org/10.13039/501100011033 PID2022-139181OB-I00
Agencia Estatal de Investigación https://doi.org/10.13039/501100011033 PRE2020-093239
dc.rights.none.fl_str_mv embargoed access
http://purl.org/coar/access_right/c_f1cf
https://rightsstatements.org/vocab/InC/1.0/
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/embargoedAccess
rights_invalid_str_mv embargoed access
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https://rightsstatements.org/vocab/InC/1.0/
eu_rights_str_mv embargoedAccess
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dc.source.none.fl_str_mv reponame:Dipòsit Digital de Documents de la UAB
instname:Universitat Autònoma de Barcelona
instname_str Universitat Autònoma de Barcelona
reponame_str Dipòsit Digital de Documents de la UAB
collection Dipòsit Digital de Documents de la UAB
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repository.mail.fl_str_mv
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