Modification of HF-treated silicon (100) surfaces by scanning tunneling microscopy in air under imaging conditions

The modification of HF-etched silicon (100) surface with a scanning tunneling microscope(STM) operated in air is studied for the first time in samples subjected to the standard HF etching without the follow-up rinsing in H2O. The modifications are produced in air under normal STM imaging conditions...

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Detalles Bibliográficos
Autores: Barniol i Beumala, Núria|||0000-0001-6325-2166, Pérez Murano, Francesc|||0000-0002-4647-8558, Aymerich Humet, Xavier|||0000-0002-5874-6257
Tipo de recurso: artículo
Fecha de publicación:1992
País:España
Institución:Universitat Autònoma de Barcelona
Repositorio:Dipòsit Digital de Documents de la UAB
Idioma:inglés
OAI Identifier:oai:ddd.uab.cat:116309
Acceso en línea:https://ddd.uab.cat/record/116309
https://dx.doi.org/urn:doi:10.1063/1.107885
Access Level:acceso abierto
Palabra clave:Scanning tunneling microscopy
Silicon
Surface oxidation
Surface treatments
Etching
Nonlinear acoustics
Scanning tunneling microscopes
Tunneling
Water vapor
Descripción
Sumario:The modification of HF-etched silicon (100) surface with a scanning tunneling microscope(STM) operated in air is studied for the first time in samples subjected to the standard HF etching without the follow-up rinsing in H2O. The modifications are produced in air under normal STM imaging conditions (V t =-1.4 V and I t =2 nA). The simultaneous acquisition of topographical, current image tunneling spectroscopy and local barrier-height images clearly shows that the nature of the modification is not only topographical but also chemical. The features produced with a resolution better than 25 nm are attributed to a tip-induced oxidation enhanced by the presence of fluorine on the surface.