Optical absorption and graphitic clusters of hydrogenated amorphophous carbon thin films

The optical absorption of hydrogenated amorphous carbon films (a‐C:H) was measured by spectroscopic ellipsometry. The a‐C:H films were deposited at different substrate temperatures by rf‐plasma of methane. A volume distribution of graphitic cluster size was assumed to reproduce the experimental spec...

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Detalles Bibliográficos
Autores: Pascual Miralles, Esther, Serra Rodríguez, Carmen, Bertrán Serra, Enric
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:1991
País:España
Institución:Universidad de Barcelona
Repositorio:Dipòsit Digital de la UB
OAI Identifier:oai:diposit.ub.edu:2445/32237
Acceso en línea:https://hdl.handle.net/2445/32237
Access Level:acceso abierto
Palabra clave:Carboni
Pel·lícules fines
Carbon
Thin films
Descripción
Sumario:The optical absorption of hydrogenated amorphous carbon films (a‐C:H) was measured by spectroscopic ellipsometry. The a‐C:H films were deposited at different substrate temperatures by rf‐plasma of methane. A volume distribution of graphitic cluster size was assumed to reproduce the experimental spectra of the absorption coefficient. The changes in the absorption coefficient and the optical gap, induced by deposition temperature, have been interpreted in terms of changes in the graphitic cluster size of the network. The increase in the deposition temperature produces an increase in the size of the graphitic clusters.