Pursuing the diffraction limit with nano-led scanning transmission optical microscopy

Recent research into miniaturized illumination sources has prompted the development of alternative microscopy techniques. Although they are still being explored, emerging nano-light-emitting-diode (nano-LED) technologies show promise in approaching the optical resolution limit in a more feasible man...

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Detalles Bibliográficos
Autores: Moreno, Sergio, Canals, Joan, Moro, Víctor, Franch, N., Vilà, Anna, Romano-Rodríguez, Alberto, Daniel Prades, Joan, Bezshlyakh, Daria D., Waag, Andreas, Kluczyk-Korch, Katarzyna, Auf der Maur, Matthias, Di Carlo, Aldo, Krieger, Sophie, Geleff, Silvana, Diéguez, A.
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2021
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/265639
Acceso en línea:http://hdl.handle.net/10261/265639
Access Level:acceso abierto
Palabra clave:CMOS sensor
Nano-LED
Optical downscaling
Nanopositioners
Miniaturization
Descripción
Sumario:Recent research into miniaturized illumination sources has prompted the development of alternative microscopy techniques. Although they are still being explored, emerging nano-light-emitting-diode (nano-LED) technologies show promise in approaching the optical resolution limit in a more feasible manner. This work presents the exploration of their capabilities with two different prototypes. In the first version, a resolution of less than 1 µm was shown thanks to a prototype based on an optically downscaled LED using an LED scanning transmission optical microscopy (STOM) technique. This research demonstrates how this technique can be used to improve STOM images by oversampling the acquisition. The second STOM-based microscope was fabricated with a 200 nm GaN LED. This demonstrates the possibilities for the miniaturization of on-chip-based microscopes.