Self-organized in-depth gradients in highly ti-doped zno films: thermal versus mw plasma annealing

Highly Ti-doped ZnO films have been produced by a spin-casting sol-gel process. The spin-casted films show high in plane homogeneity and optical quality. However, when inspected in depth, the surface composition is Ti rich. We show that two possible annealing processes can be considered depending on...

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Autores: Ramadan Shehata Ali, Rehab, Fernández-Ruiz, Ramón, Manso Silván, Miguel
Tipo de recurso: artículo
Fecha de publicación:2020
País:España
Institución:Universidad Autónoma de Madrid
Repositorio:Biblos-e Archivo. Repositorio Institucional de la UAM
Idioma:inglés
OAI Identifier:oai:repositorio.uam.es:10486/698406
Acceso en línea:http://hdl.handle.net/10486/698406
https://dx.doi.org/10.3390/coatings10040418
Access Level:acceso abierto
Palabra clave:Highly doped semiconductors
Zinc Oxide
Sol-gel
Bandgap
GI-XRF
Física
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spelling Self-organized in-depth gradients in highly ti-doped zno films: thermal versus mw plasma annealingRamadan Shehata Ali, RehabFernández-Ruiz, RamónManso Silván, MiguelHighly doped semiconductorsZinc OxideSol-gelBandgapGI-XRFFísicaHighly Ti-doped ZnO films have been produced by a spin-casting sol-gel process. The spin-casted films show high in plane homogeneity and optical quality. However, when inspected in depth, the surface composition is Ti rich. We show that two possible annealing processes can be considered depending on the properties to exploit. To promote in-depth homogenization, thermal annealing processes have been applied. Meanwhile, the gradients can be exacerbated, thanks to a non-negligible surface sputtering, by applying microwave (MW) plasma treatments with Ar discharges at different pressures. The microstructural properties of the differently processed films have been obtained prior to a study by grazing incidence X-ray fluorescence (GI-XRF) spectroscopy, which reveals the in-depth composition trends induced by the two alternative annealing procedures. The final wetting, electrical and optical properties of the films are described in accordance with the Ti distribution pattern revealed by GI-XRF. The study underlines for the first time how MW plasma annealing processes can be used to exacerbate self-induced atomic gradients in sol-gel films with potential implications in catalytic and biomedical applicationsWe are thankful for funding from the Ministry of Science, Innovation and Universities of Spain, through grant CTQ2017-84309-C2-2-RMDPIDepartamento de Física AplicadaFacultad de Ciencias20202020-04-23research articlehttp://purl.org/coar/resource_type/c_2df8fbb1VoRhttp://purl.org/coar/version/c_970fb48d4fbd8a85info:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/10486/698406https://dx.doi.org/10.3390/coatings10040418reponame:Biblos-e Archivo. Repositorio Institucional de la UAMinstname:Universidad Autónoma de MadridInglésengopen accesshttp://purl.org/coar/access_right/c_abf2info:eu-repo/semantics/openAccessoai:repositorio.uam.es:10486/6984062026-06-23T12:46:27Z
dc.title.none.fl_str_mv Self-organized in-depth gradients in highly ti-doped zno films: thermal versus mw plasma annealing
title Self-organized in-depth gradients in highly ti-doped zno films: thermal versus mw plasma annealing
spellingShingle Self-organized in-depth gradients in highly ti-doped zno films: thermal versus mw plasma annealing
Ramadan Shehata Ali, Rehab
Highly doped semiconductors
Zinc Oxide
Sol-gel
Bandgap
GI-XRF
Física
title_short Self-organized in-depth gradients in highly ti-doped zno films: thermal versus mw plasma annealing
title_full Self-organized in-depth gradients in highly ti-doped zno films: thermal versus mw plasma annealing
title_fullStr Self-organized in-depth gradients in highly ti-doped zno films: thermal versus mw plasma annealing
title_full_unstemmed Self-organized in-depth gradients in highly ti-doped zno films: thermal versus mw plasma annealing
title_sort Self-organized in-depth gradients in highly ti-doped zno films: thermal versus mw plasma annealing
dc.creator.none.fl_str_mv Ramadan Shehata Ali, Rehab
Fernández-Ruiz, Ramón
Manso Silván, Miguel
author Ramadan Shehata Ali, Rehab
author_facet Ramadan Shehata Ali, Rehab
Fernández-Ruiz, Ramón
Manso Silván, Miguel
author_role author
author2 Fernández-Ruiz, Ramón
Manso Silván, Miguel
author2_role author
author
dc.contributor.none.fl_str_mv Departamento de Física Aplicada
Facultad de Ciencias
dc.subject.none.fl_str_mv Highly doped semiconductors
Zinc Oxide
Sol-gel
Bandgap
GI-XRF
Física
topic Highly doped semiconductors
Zinc Oxide
Sol-gel
Bandgap
GI-XRF
Física
description Highly Ti-doped ZnO films have been produced by a spin-casting sol-gel process. The spin-casted films show high in plane homogeneity and optical quality. However, when inspected in depth, the surface composition is Ti rich. We show that two possible annealing processes can be considered depending on the properties to exploit. To promote in-depth homogenization, thermal annealing processes have been applied. Meanwhile, the gradients can be exacerbated, thanks to a non-negligible surface sputtering, by applying microwave (MW) plasma treatments with Ar discharges at different pressures. The microstructural properties of the differently processed films have been obtained prior to a study by grazing incidence X-ray fluorescence (GI-XRF) spectroscopy, which reveals the in-depth composition trends induced by the two alternative annealing procedures. The final wetting, electrical and optical properties of the films are described in accordance with the Ti distribution pattern revealed by GI-XRF. The study underlines for the first time how MW plasma annealing processes can be used to exacerbate self-induced atomic gradients in sol-gel films with potential implications in catalytic and biomedical applications
publishDate 2020
dc.date.none.fl_str_mv 2020
2020-04-23
dc.type.none.fl_str_mv research article
http://purl.org/coar/resource_type/c_2df8fbb1
VoR
http://purl.org/coar/version/c_970fb48d4fbd8a85
dc.type.openaire.fl_str_mv info:eu-repo/semantics/article
format article
dc.identifier.none.fl_str_mv http://hdl.handle.net/10486/698406
https://dx.doi.org/10.3390/coatings10040418
url http://hdl.handle.net/10486/698406
https://dx.doi.org/10.3390/coatings10040418
dc.language.none.fl_str_mv Inglés
eng
language_invalid_str_mv Inglés
language eng
dc.rights.none.fl_str_mv open access
http://purl.org/coar/access_right/c_abf2
dc.rights.openaire.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv open access
http://purl.org/coar/access_right/c_abf2
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv MDPI
publisher.none.fl_str_mv MDPI
dc.source.none.fl_str_mv reponame:Biblos-e Archivo. Repositorio Institucional de la UAM
instname:Universidad Autónoma de Madrid
instname_str Universidad Autónoma de Madrid
reponame_str Biblos-e Archivo. Repositorio Institucional de la UAM
collection Biblos-e Archivo. Repositorio Institucional de la UAM
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,301629

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