Integrated micro- and nano-optical biosensor silicon devices CMOS compatible

15 páginas, 18 figuras.-- Trabajo presentado en la conferencia "Optoelectronic Integration on Silicon"; San Jose, CA (USA); 15-Julio-2004; Editores: David J. Robbins, Ghassan E. Jabbour .

Detalles Bibliográficos
Autores: Lechuga, Laura M., Sepúlveda, Borja, Sánchez del Río, José, Blanco, Francisco J., Calle Martín, Ana, Domínguez Horna, Carlos
Tipo de recurso: artículo
Fecha de publicación:2004
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/27901
Acceso en línea:http://hdl.handle.net/10261/27901
Access Level:acceso abierto
Palabra clave:Optical biosensor
Mach-Zehnder interferometer
Integrated optics
BioMEMS
Optical waveguides
Immobilization at nanometer scale
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spelling Integrated micro- and nano-optical biosensor silicon devices CMOS compatibleLechuga, Laura M.Sepúlveda, BorjaSánchez del Río, JoséBlanco, Francisco J.Calle Martín, AnaDomínguez Horna, CarlosOptical biosensorMach-Zehnder interferometerIntegrated opticsBioMEMSOptical waveguidesImmobilization at nanometer scale15 páginas, 18 figuras.-- Trabajo presentado en la conferencia "Optoelectronic Integration on Silicon"; San Jose, CA (USA); 15-Julio-2004; Editores: David J. Robbins, Ghassan E. Jabbour .We show the design, fabrication and testing of micro/nanobiosensor devices based on optical waveguides in a highly sensitive interferometric configuration and by using evanescent wave detection. The devices are fabricated by standard Silicon CMOS microelectronics technology after a precise design for achieving a high sensitivity for biosensing applications. Two integrated Mach-Zehnder interferometric (MZI) devices, using two technologies, have been developed: (a) a MZI Microdevice based on ARROW waveguide (b) a MZI Nanodevice based on TIR waveguide. Direct biosensing with both sensors has been tested, after a specific receptor coupling to the surface device using nanometer scale immobilization techniques. Further integration of the microoptical sensors, the microfluidics, the photodetectors and the CMOS electronics will render in a lab-on-a-chip microsystem.This work has been supported by the national project BIO2000-0351-P4. B Sepúlveda acknowledges CSIC-I3P program the financial support for Ph. D. studies.Peer reviewedThe International Society for Optics and PhotonicsConsejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]201020102004info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501459230 bytesapplication/pdfhttp://hdl.handle.net/10261/27901reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Ingléshttp://dx.doi.org/10.1117/12.521104Síinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/279012026-05-22T06:33:51Z
dc.title.none.fl_str_mv Integrated micro- and nano-optical biosensor silicon devices CMOS compatible
title Integrated micro- and nano-optical biosensor silicon devices CMOS compatible
spellingShingle Integrated micro- and nano-optical biosensor silicon devices CMOS compatible
Lechuga, Laura M.
Optical biosensor
Mach-Zehnder interferometer
Integrated optics
BioMEMS
Optical waveguides
Immobilization at nanometer scale
title_short Integrated micro- and nano-optical biosensor silicon devices CMOS compatible
title_full Integrated micro- and nano-optical biosensor silicon devices CMOS compatible
title_fullStr Integrated micro- and nano-optical biosensor silicon devices CMOS compatible
title_full_unstemmed Integrated micro- and nano-optical biosensor silicon devices CMOS compatible
title_sort Integrated micro- and nano-optical biosensor silicon devices CMOS compatible
dc.creator.none.fl_str_mv Lechuga, Laura M.
Sepúlveda, Borja
Sánchez del Río, José
Blanco, Francisco J.
Calle Martín, Ana
Domínguez Horna, Carlos
author Lechuga, Laura M.
author_facet Lechuga, Laura M.
Sepúlveda, Borja
Sánchez del Río, José
Blanco, Francisco J.
Calle Martín, Ana
Domínguez Horna, Carlos
author_role author
author2 Sepúlveda, Borja
Sánchez del Río, José
Blanco, Francisco J.
Calle Martín, Ana
Domínguez Horna, Carlos
author2_role author
author
author
author
author
dc.contributor.none.fl_str_mv Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]
dc.subject.none.fl_str_mv Optical biosensor
Mach-Zehnder interferometer
Integrated optics
BioMEMS
Optical waveguides
Immobilization at nanometer scale
topic Optical biosensor
Mach-Zehnder interferometer
Integrated optics
BioMEMS
Optical waveguides
Immobilization at nanometer scale
description 15 páginas, 18 figuras.-- Trabajo presentado en la conferencia "Optoelectronic Integration on Silicon"; San Jose, CA (USA); 15-Julio-2004; Editores: David J. Robbins, Ghassan E. Jabbour .
publishDate 2004
dc.date.none.fl_str_mv 2004
2010
2010
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
format article
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/27901
url http://hdl.handle.net/10261/27901
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv http://dx.doi.org/10.1117/12.521104
Sí
dc.rights.none.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 459230 bytes
application/pdf
dc.publisher.none.fl_str_mv The International Society for Optics and Photonics
publisher.none.fl_str_mv The International Society for Optics and Photonics
dc.source.none.fl_str_mv reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC
instname:Consejo Superior de Investigaciones Científicas (CSIC)
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
repository.name.fl_str_mv
repository.mail.fl_str_mv
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score 15,811543

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