ZnOTe Compounds Grown by DC-Magnetron Co-Sputtering

ZnOTe compounds were grown by DC magnetron cosputtering from pure Tellurium (Te) and Zinc (Zn) cathodes in O2/Ar atmosphere. The applied power on the Zn target was constant equal to 100 W, while the one applied on the Te target took two values, i.e., 5 W and 10 W. Thus, two sample series were obtain...

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Detalhes bibliográficos
Autores: Sánchez Garrido, Olga, Hernández-Vélez, M.
Tipo de documento: artigo
Estado:Versão publicada
Data de publicação:2021
País:España
Recursos:Consejo Superior de Investigaciones Científicas (CSIC)
Repositório:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/242475
Acesso em linha:http://hdl.handle.net/10261/242475
Access Level:Acceso aberto
Palavra-chave:DC magnetron cosputtering
ZnOTe alloy
XRD patterns
RBS experiments
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spelling ZnOTe Compounds Grown by DC-Magnetron Co-SputteringSánchez Garrido, OlgaHernández-Vélez, M.DC magnetron cosputteringZnOTe alloyXRD patternsRBS experimentsZnOTe compounds were grown by DC magnetron cosputtering from pure Tellurium (Te) and Zinc (Zn) cathodes in O2/Ar atmosphere. The applied power on the Zn target was constant equal to 100 W, while the one applied on the Te target took two values, i.e., 5 W and 10 W. Thus, two sample series were obtained in which the variable parameter was the distance from the Te targets to the substrate. Sample compositions were determined by Rutherford Backscattering Spectroscopy (RBS) experiments. Structural analysis was done using X-Ray diffraction (XRD) spectrometry and the growth of the hexagonal w-ZnO phase was identified in the XRD spectra. RBS results showed high bulk homogeneity of the samples forming ZnOTe alloys, with variable Te molar fraction (MF) ranging from 0.48–0.6% and from 1.9–3.1% for the sample series obtained at 5 W and 10 W, respectively. The results reflect great differences between the two sample series, particularly from the structural and optical point of view. These experiments point to the possibility of Te doping ZnO with the permanence of intrinsic defects, as well as the possibility of the formation of other Te solid phases when its content increases. The results and appreciable variations in the band gap transitions were detected from Photoluminescence (PL) measurements.This work was supported by the Ministerio de Ciencia, Innovación y Universidades of Spain through the Project RTI2018-095137-B-I00.Peer reviewedMultidisciplinary Digital Publishing InstituteMinisterio de Ciencia, Innovación y Universidades (España)Agencia Estatal de Investigación (España)Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]2021202120212021info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501Publisher's versioninfo:eu-repo/semantics/publishedVersionapplication/pdfhttp://hdl.handle.net/10261/242475reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Inglés#PLACEHOLDER_PARENT_METADATA_VALUE#info:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/RTI2018-095137-B-I00https://doi.org/10.3390/coatings11050570Síinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/2424752026-05-22T06:33:51Z
dc.title.none.fl_str_mv ZnOTe Compounds Grown by DC-Magnetron Co-Sputtering
title ZnOTe Compounds Grown by DC-Magnetron Co-Sputtering
spellingShingle ZnOTe Compounds Grown by DC-Magnetron Co-Sputtering
Sánchez Garrido, Olga
DC magnetron cosputtering
ZnOTe alloy
XRD patterns
RBS experiments
title_short ZnOTe Compounds Grown by DC-Magnetron Co-Sputtering
title_full ZnOTe Compounds Grown by DC-Magnetron Co-Sputtering
title_fullStr ZnOTe Compounds Grown by DC-Magnetron Co-Sputtering
title_full_unstemmed ZnOTe Compounds Grown by DC-Magnetron Co-Sputtering
title_sort ZnOTe Compounds Grown by DC-Magnetron Co-Sputtering
dc.creator.none.fl_str_mv Sánchez Garrido, Olga
Hernández-Vélez, M.
author Sánchez Garrido, Olga
author_facet Sánchez Garrido, Olga
Hernández-Vélez, M.
author_role author
author2 Hernández-Vélez, M.
author2_role author
dc.contributor.none.fl_str_mv Ministerio de Ciencia, Innovación y Universidades (España)
Agencia Estatal de Investigación (España)
Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]
dc.subject.none.fl_str_mv DC magnetron cosputtering
ZnOTe alloy
XRD patterns
RBS experiments
topic DC magnetron cosputtering
ZnOTe alloy
XRD patterns
RBS experiments
description ZnOTe compounds were grown by DC magnetron cosputtering from pure Tellurium (Te) and Zinc (Zn) cathodes in O2/Ar atmosphere. The applied power on the Zn target was constant equal to 100 W, while the one applied on the Te target took two values, i.e., 5 W and 10 W. Thus, two sample series were obtained in which the variable parameter was the distance from the Te targets to the substrate. Sample compositions were determined by Rutherford Backscattering Spectroscopy (RBS) experiments. Structural analysis was done using X-Ray diffraction (XRD) spectrometry and the growth of the hexagonal w-ZnO phase was identified in the XRD spectra. RBS results showed high bulk homogeneity of the samples forming ZnOTe alloys, with variable Te molar fraction (MF) ranging from 0.48–0.6% and from 1.9–3.1% for the sample series obtained at 5 W and 10 W, respectively. The results reflect great differences between the two sample series, particularly from the structural and optical point of view. These experiments point to the possibility of Te doping ZnO with the permanence of intrinsic defects, as well as the possibility of the formation of other Te solid phases when its content increases. The results and appreciable variations in the band gap transitions were detected from Photoluminescence (PL) measurements.
publishDate 2021
dc.date.none.fl_str_mv 2021
2021
2021
2021
dc.type.none.fl_str_mv info:eu-repo/semantics/article
http://purl.org/coar/resource_type/c_6501
Publisher's version
info:eu-repo/semantics/publishedVersion
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status_str publishedVersion
dc.identifier.none.fl_str_mv http://hdl.handle.net/10261/242475
url http://hdl.handle.net/10261/242475
dc.language.none.fl_str_mv Inglés
language_invalid_str_mv Inglés
dc.relation.none.fl_str_mv #PLACEHOLDER_PARENT_METADATA_VALUE#
info:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/RTI2018-095137-B-I00
https://doi.org/10.3390/coatings11050570

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publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute
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