ZnOTe Compounds Grown by DC-Magnetron Co-Sputtering
ZnOTe compounds were grown by DC magnetron cosputtering from pure Tellurium (Te) and Zinc (Zn) cathodes in O2/Ar atmosphere. The applied power on the Zn target was constant equal to 100 W, while the one applied on the Te target took two values, i.e., 5 W and 10 W. Thus, two sample series were obtain...
| Autores: | , |
|---|---|
| Tipo de documento: | artigo |
| Estado: | Versão publicada |
| Data de publicação: | 2021 |
| País: | España |
| Recursos: | Consejo Superior de Investigaciones Científicas (CSIC) |
| Repositório: | DIGITAL.CSIC. Repositorio Institucional del CSIC |
| OAI Identifier: | oai:digital.csic.es:10261/242475 |
| Acesso em linha: | http://hdl.handle.net/10261/242475 |
| Access Level: | Acceso aberto |
| Palavra-chave: | DC magnetron cosputtering ZnOTe alloy XRD patterns RBS experiments |
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ZnOTe Compounds Grown by DC-Magnetron Co-SputteringSánchez Garrido, OlgaHernández-Vélez, M.DC magnetron cosputteringZnOTe alloyXRD patternsRBS experimentsZnOTe compounds were grown by DC magnetron cosputtering from pure Tellurium (Te) and Zinc (Zn) cathodes in O2/Ar atmosphere. The applied power on the Zn target was constant equal to 100 W, while the one applied on the Te target took two values, i.e., 5 W and 10 W. Thus, two sample series were obtained in which the variable parameter was the distance from the Te targets to the substrate. Sample compositions were determined by Rutherford Backscattering Spectroscopy (RBS) experiments. Structural analysis was done using X-Ray diffraction (XRD) spectrometry and the growth of the hexagonal w-ZnO phase was identified in the XRD spectra. RBS results showed high bulk homogeneity of the samples forming ZnOTe alloys, with variable Te molar fraction (MF) ranging from 0.48–0.6% and from 1.9–3.1% for the sample series obtained at 5 W and 10 W, respectively. The results reflect great differences between the two sample series, particularly from the structural and optical point of view. These experiments point to the possibility of Te doping ZnO with the permanence of intrinsic defects, as well as the possibility of the formation of other Te solid phases when its content increases. The results and appreciable variations in the band gap transitions were detected from Photoluminescence (PL) measurements.This work was supported by the Ministerio de Ciencia, Innovación y Universidades of Spain through the Project RTI2018-095137-B-I00.Peer reviewedMultidisciplinary Digital Publishing InstituteMinisterio de Ciencia, Innovación y Universidades (España)Agencia Estatal de Investigación (España)Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72]2021202120212021info:eu-repo/semantics/articlehttp://purl.org/coar/resource_type/c_6501Publisher's versioninfo:eu-repo/semantics/publishedVersionapplication/pdfhttp://hdl.handle.net/10261/242475reponame:DIGITAL.CSIC. Repositorio Institucional del CSICinstname:Consejo Superior de Investigaciones Científicas (CSIC)Inglés#PLACEHOLDER_PARENT_METADATA_VALUE#info:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/RTI2018-095137-B-I00https://doi.org/10.3390/coatings11050570Síinfo:eu-repo/semantics/openAccessoai:digital.csic.es:10261/2424752026-05-22T06:33:51Z |
| dc.title.none.fl_str_mv |
ZnOTe Compounds Grown by DC-Magnetron Co-Sputtering |
| title |
ZnOTe Compounds Grown by DC-Magnetron Co-Sputtering |
| spellingShingle |
ZnOTe Compounds Grown by DC-Magnetron Co-Sputtering Sánchez Garrido, Olga DC magnetron cosputtering ZnOTe alloy XRD patterns RBS experiments |
| title_short |
ZnOTe Compounds Grown by DC-Magnetron Co-Sputtering |
| title_full |
ZnOTe Compounds Grown by DC-Magnetron Co-Sputtering |
| title_fullStr |
ZnOTe Compounds Grown by DC-Magnetron Co-Sputtering |
| title_full_unstemmed |
ZnOTe Compounds Grown by DC-Magnetron Co-Sputtering |
| title_sort |
ZnOTe Compounds Grown by DC-Magnetron Co-Sputtering |
| dc.creator.none.fl_str_mv |
Sánchez Garrido, Olga Hernández-Vélez, M. |
| author |
Sánchez Garrido, Olga |
| author_facet |
Sánchez Garrido, Olga Hernández-Vélez, M. |
| author_role |
author |
| author2 |
Hernández-Vélez, M. |
| author2_role |
author |
| dc.contributor.none.fl_str_mv |
Ministerio de Ciencia, Innovación y Universidades (España) Agencia Estatal de Investigación (España) Consejo Superior de Investigaciones Científicas [https://ror.org/02gfc7t72] |
| dc.subject.none.fl_str_mv |
DC magnetron cosputtering ZnOTe alloy XRD patterns RBS experiments |
| topic |
DC magnetron cosputtering ZnOTe alloy XRD patterns RBS experiments |
| description |
ZnOTe compounds were grown by DC magnetron cosputtering from pure Tellurium (Te) and Zinc (Zn) cathodes in O2/Ar atmosphere. The applied power on the Zn target was constant equal to 100 W, while the one applied on the Te target took two values, i.e., 5 W and 10 W. Thus, two sample series were obtained in which the variable parameter was the distance from the Te targets to the substrate. Sample compositions were determined by Rutherford Backscattering Spectroscopy (RBS) experiments. Structural analysis was done using X-Ray diffraction (XRD) spectrometry and the growth of the hexagonal w-ZnO phase was identified in the XRD spectra. RBS results showed high bulk homogeneity of the samples forming ZnOTe alloys, with variable Te molar fraction (MF) ranging from 0.48–0.6% and from 1.9–3.1% for the sample series obtained at 5 W and 10 W, respectively. The results reflect great differences between the two sample series, particularly from the structural and optical point of view. These experiments point to the possibility of Te doping ZnO with the permanence of intrinsic defects, as well as the possibility of the formation of other Te solid phases when its content increases. The results and appreciable variations in the band gap transitions were detected from Photoluminescence (PL) measurements. |
| publishDate |
2021 |
| dc.date.none.fl_str_mv |
2021 2021 2021 2021 |
| dc.type.none.fl_str_mv |
info:eu-repo/semantics/article http://purl.org/coar/resource_type/c_6501 Publisher's version info:eu-repo/semantics/publishedVersion |
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article |
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publishedVersion |
| dc.identifier.none.fl_str_mv |
http://hdl.handle.net/10261/242475 |
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http://hdl.handle.net/10261/242475 |
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Inglés |
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Inglés |
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#PLACEHOLDER_PARENT_METADATA_VALUE# info:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/RTI2018-095137-B-I00 https://doi.org/10.3390/coatings11050570 Sí |
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info:eu-repo/semantics/openAccess |
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openAccess |
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application/pdf |
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Multidisciplinary Digital Publishing Institute |
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Multidisciplinary Digital Publishing Institute |
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reponame:DIGITAL.CSIC. Repositorio Institucional del CSIC instname:Consejo Superior de Investigaciones Científicas (CSIC) |
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DIGITAL.CSIC. Repositorio Institucional del CSIC |
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