Piezoelectric MEMS Resonators for Cigarette Particle Detection
In this work, we demonstrate the potential of a piezoelectric resonator for developing a low-cost sensor system to detect microscopic particles in real-time, which can be present in a wide variety of environments and workplaces. The sensor working principle is based on the resonance frequency shift...
| Autores: | , , , , , |
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| Tipo de recurso: | artículo |
| Fecha de publicación: | 2019 |
| País: | España |
| Institución: | Universidad Rey Juan Carlos |
| Repositorio: | BURJC-Digital. Repositorio Institucional de la Universidad Rey Juan Carlos |
| OAI Identifier: | oai:burjcdigital.urjc.es:10115/29644 |
| Acceso en línea: | https://hdl.handle.net/10115/29644 |
| Access Level: | acceso abierto |
| Palabra clave: | Aluminum nitride (AlN) Low-cost circuit Microelectromechanical systems (MEMS) Particle Phase-locked loop Piezoelectric |
| Sumario: | In this work, we demonstrate the potential of a piezoelectric resonator for developing a low-cost sensor system to detect microscopic particles in real-time, which can be present in a wide variety of environments and workplaces. The sensor working principle is based on the resonance frequency shift caused by particles collected on the resonator surface. To test the sensor sensitivity obtained from mass-loading effects, an Aluminum Nitride-based piezoelectric resonator was exposed to cigarette particles in a sealed chamber. In order to determine the resonance parameters of interest, an interface circuit was implemented and included within both open-loop and closed-loop schemes for comparison. The system was capable of tracking the resonance frequency with a mass sensitivity of 8.8 Hz/ng. Although the tests shown here were proven by collecting particles from a cigarette, the results obtained in this application may have interest and can be extended towards other applications, such as monitoring of nanoparticles in a workplace environment. |
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