Influence of the yttria content on the mechanical properties of Y2O3-ZrO2 thin films prepared by EB-PVD
A mechanical characterization study of the whole range (ZrO2)1−x–(Y2O3)x system is presented for thin film samples. Films have been prepared by Electron Beam Physical Vapour Deposition (EB-PVD) on Si(1 0 0) substrates. The mechanical characterization, obtained from nanoindentation and Brillouin Ligh...
| Autores: | , , , , , |
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| Tipo de recurso: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2007 |
| País: | España |
| Institución: | Universidad de Sevilla (US) |
| Repositorio: | idUS. Depósito de Investigación de la Universidad de Sevilla |
| OAI Identifier: | oai:idus.us.es:11441/147570 |
| Acceso en línea: | https://hdl.handle.net/11441/147570 https://doi.org/10.1016/j.vacuum.2007.04.028 |
| Access Level: | acceso abierto |
| Palabra clave: | EB-PVD preparation of yttria-stabilized zirconia thin films Mechanical properties yttria zirconia system |
| Sumario: | A mechanical characterization study of the whole range (ZrO2)1−x–(Y2O3)x system is presented for thin film samples. Films have been prepared by Electron Beam Physical Vapour Deposition (EB-PVD) on Si(1 0 0) substrates. The mechanical characterization, obtained from nanoindentation and Brillouin Light scattering (BLS) techniques, shows a monotonous behaviour between the two pure compounds of the series except for the film with 0.08 Y2O3 molar content of yttria-stabilized zirconia (YSZ) solid solution that presents an anomalous hard value. Additionally, BLS is presented as an alternative technique to the study of the mechanical properties of this system. |
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