Macroporous silicon for gas detection
Macroporous silicon (MPS) has been shown to be a promising material in many areas of technical interest. In particular, MPS has been applied for electronic devices and microfluidic applications. One of the most promising features of MPS is that it enables the development of optical applications usin...
| Autores: | , |
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| Tipo de recurso: | capítulo de libro |
| Fecha de publicación: | 2018 |
| País: | España |
| Institución: | Universitat Politècnica de Catalunya (UPC) |
| Repositorio: | UPCommons. Portal del coneixement obert de la UPC |
| Idioma: | inglés |
| OAI Identifier: | oai:upcommons.upc.edu:2117/192972 |
| Acceso en línea: | https://hdl.handle.net/2117/192972 https://dx.doi.org/10.5772/intechopen.76439 |
| Access Level: | acceso abierto |
| Palabra clave: | Photonics Macroporous silicon Photonic crystal Electrochemical etching Non-dispersive infrared Gas sensing Fotònica Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Telecomunicació òptica::Fotònica |
| Sumario: | Macroporous silicon (MPS) has been shown to be a promising material in many areas of technical interest. In particular, MPS has been applied for electronic devices and microfluidic applications. One of the most promising features of MPS is that it enables the development of optical applications using simple and cost-effective technology, compatible with MEMS fabrication processes and suitable for mass production. This chapter describes the application of MPS structures fabricated using electrochemical etching (EE) for the detection of gases of environmental concern in the wavelength range comprising 4 µ m to 15 µ m , such as C O 2 . Vertical-modulated MPS structures are reported, whose photonic bandgaps can be placed at different wavelengths depending on the application needs. These structures have been applied to the quantification of C O 2 , and these results are summarised here. Detection is performed by the direct measure of absorption, obtaining promising results with short optical paths. |
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