HMR-based optical gas detection with CuO and ZnO coatings
This work presents the fabrication of hyperbolic mode resonance-based optical sensors by means of sputtered copper oxide (CuO) and zinc oxide (ZnO), and the study of their performance for gas sensing purposes. Two sensors were fabricated in a planar waveguide configuration with an intermediate gold...
| Autores: | , , |
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| Tipo de recurso: | artículo |
| Estado: | Versión aceptada para publicación |
| Fecha de publicación: | 2025 |
| País: | España |
| Institución: | Universidad Pública de Navarra |
| Repositorio: | Academica-e. Repositorio Institucional de la Universidad Pública de Navarra |
| OAI Identifier: | oai:academica-e.unavarra.es:2454/54570 |
| Acceso en línea: | https://hdl.handle.net/2454/54570 |
| Access Level: | acceso abierto |
| Palabra clave: | Sensor materials Gas sensors Hyperbolic mode resonance (HMR) Lossy mode resonance (LMR) Metal oxides thin film |
| Sumario: | This work presents the fabrication of hyperbolic mode resonance-based optical sensors by means of sputtered copper oxide (CuO) and zinc oxide (ZnO), and the study of their performance for gas sensing purposes. Two sensors were fabricated in a planar waveguide configuration with an intermediate gold thin film, and resonances were observed in the visible region of the electromagnetic spectrum. Both materials were analyzed with X-ray diffraction techniques, and their response was characterized by different concentrations of a group of gases comprised of nitric oxide, acetylene (C2H2), ethanol, carbon dioxide, and relative humidity. The best performance corresponds to the CuO sensor for C2H2 gas, presenting a sensitivity of 1.11 nm/parts per million (ppm) and a limit of detection of 12.6 ppb, with response and recovery times of 70 and 68 s, respectively. ZnO-based sensors allowed for a comprehensive study of ethanol in a range of thousands of ppm, while CuO-based sensors showed exceptional sensitivity for most gases in the range of a few ppm. All measurements were performed at room temperature. |
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