Tapered silicon nanowires for enhanced nanomechanical sensing

We investigate the effect of controllably induced tapering on the resonant vibrations and sensing performance of silicon nanowires. Simple analytical expressions for the resonance frequencies of the first two flexural modes as a function of the tapering degree are presented. Experimental measurement...

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Detalles Bibliográficos
Autores: Malvar, Óscar, Gil-Santos, Eduardo, Ruz Martínez, José Jaime, Ramos Vega, Daniel, Pini, Valerio, Fernández-Regúlez, Marta, Calleja, Montserrat, Tamayo de Miguel, Francisco Javier, San Paulo, Álvaro
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2013
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/132832
Acceso en línea:http://hdl.handle.net/10261/132832
Access Level:acceso abierto
Descripción
Sumario:We investigate the effect of controllably induced tapering on the resonant vibrations and sensing performance of silicon nanowires. Simple analytical expressions for the resonance frequencies of the first two flexural modes as a function of the tapering degree are presented. Experimental measurements of the resonance frequencies of singly clamped nanowires are compared with the theory. Our model is valid for any nanostructure with tapered geometry, and it predicts a reduction beyond two orders of magnitude of the mass detection limit for conical resonators as compared to uniform beams with the same length and diameter at the clamp. © 2013 AIP Publishing LLC.